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Lumin Li

Lam Research

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Publication

Featured researches published by Lumin Li.

Archive | 2001

Dual frequency plasma processor

Rajinder Dhindsa; Mukund Srinivasan; Eric Lenz; Lumin Li

Archive | 2004

Multiple frequency plasma etch reactor

Raj Dhindsa; S.M. Sadjadi; Felix Kozakevich; Dave Trussell; Lumin Li; Eric Lenz; Camelia Rusu; Mukund Srinivasan; Aaron Eppler; Jim Tietz; Jeffrey Marks

Archive | 2010

Apparatuses for adjusting electrode gap in capacitively-coupled RF plasma reactor

Rajinder Dhindsa; Eric Lenz; Andy W. Desepte; Lumin Li

Archive | 1998

Semiconductor process chamber electrode

Andras Kuthi; Lumin Li

Archive | 2006

Electrostatic chuck assembly with dielectric material and/or cavity having varying thickness, profile and/or shape, method of use and apparatus incorporating same

Rajinder Dhindsa; Eric Lenz; Lumin Li; Felix Kozakevich

Archive | 2010

Apparatus and method for controlling plasma density profile

Rajinder Dhindsa; Felix Kozakevich; Lumin Li; Dave Trussell

Archive | 2005

Apparatus and method for controlling etch uniformity

Eric Lenz; Raj Dhindsa; Dave Trussell; Lumin Li

Archive | 2004

Electrically enhancing the confinement of plasma

Andras Kuthi; Jisoo Kim; Eric Lenz; Rajindar Dhindsa; Lumin Li; Reza Sadjadi

Archive | 2010

Apparatus and Method for Controlling Plasma Potential

Douglas Keil; Lumin Li; Reza Sadjadi; Eric Hudson; Eric Lenz; Rajinder Dhindsa

Archive | 1999

Semiconductor process chamber electrode and method for making the same

Andras Kuthi; Lumin Li

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Collaboration

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Rajinder Dhindsa

Lam Research

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Eric Lenz

Lam Research

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Eric Hudson

Lam Research

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Felix Kozakevich

Lam Research

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Mukund Srinivasan

Lam Research

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Reza Sadjadi

Lam Research

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Dave Trussell

Lam Research

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Camelia Rusu

Lam Research

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Aaron Eppler

Lam Research

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Alexei Marakhtanov

Lam Research

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