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James Rogers

Lam Research

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Publication

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Archive | 2006

Plasma confinement ring assemblies having reduced polymer deposition characteristics

Rajinder Dhindsa; Felix Kozakevich; James Rogers; David Trussell

Archive | 2010

Methods and apparatus for detecting the confinement state of plasma in a plasma processing system

John C. Valcore; James Rogers

Archive | 2012

Plasma confinement rings including RF absorbing material for reducing polymer deposition

James Rogers

Archive | 2016

GAS INJECTION METHOD FOR UNIFORMLY PROCESSING A SEMICONDUCTOR SUBSTRATE IN A SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS

James Rogers; Zhigang Chen; John Holland; Kyle Spaulding

Archive | 2009

PROCESS FOR WAFER TEMPERATURE VERIFICATION IN ETCH TOOLS

Keren J. Kanarik; C. Robert Koemtzopoulos; James Rogers; Bi Ming Yen

Archive | 2012

Peripheral RF Feed and Symmetric RF Return for Symmetric RF Delivery

Sang Ki Nam; Rajinder Dhindsa; James Rogers

Archive | 2009

METHODS AND APPARATUS FOR WAFER AREA PRESSURE CONTROL IN AN ADJUSTABLE GAP PLASMA CHAMBER

Rajinder Dhindsa; James Rogers

Archive | 2014

RF Impedance Model Based Fault Detection

John C. Valcore; James Rogers; Nicholas E. Webb; Peter T. Muraoka

Archive | 2012

Dual zone temperature control of upper electrodes

Alexei Marakhtanov; Rajinder Dhindsa; Ryan Bise; Lumin Li; Sang Ki Nam; James Rogers; Eric Hudson; Gerardo Delgadino; Andrew D. Bailey; Mike Kellogg; Anthony de la Llera

Archive | 2017

TIME VARYING SEGMENTED PRESSURE CONTROL

Kyle Spaulding; James Rogers

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Rajinder Dhindsa

Lam Research

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Alexei Marakhtanov

Lam Research

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Andrew D. Bailey

Lam Research

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David Trussell

Lam Research

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Eric Hudson

Lam Research

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Felix Kozakevich

Lam Research

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Gerardo Delgadino

Lam Research

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Lumin Li

Lam Research

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Mike Kellogg

Lam Research

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Ryan Bise

Lam Research

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