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Dive into the research topics where Goldbach Matthias is active.

Publication


Featured researches published by Goldbach Matthias.


Archive | 2002

Verfahren zur Strukturierung einer Siliziumoxid-Schicht

Goldbach Matthias; Hausdoerfer Bastian; Grahl Ortrun


Archive | 2005

Method for fabricating a trench capacitor with an insulation collar which is electrically connected to a substrate on one side via a buried contact, in particular for a semiconductor memory cell

Goldbach Matthias


Archive | 2001

Kontaktfederanordnung zur Kontaktierung eines Halbleiterwafers sowie Verfahren zu deren Herstellung

Goldbach Matthias; Birner Albert; Franosch Martin


Archive | 2003

Process for anisotropic deep trench etching in a silicon substrate comprises deep trench etching in the silicon substrate up to a prescribed etching depth so that the re-deposit is replaced by a protective layer for side wall passivation

Goldbach Matthias; Moll Peter


Archive | 2003

Speicherzellenfeld und Verfahren zu seiner Herstellung

Goldbach Matthias; Schloesser Till


Archive | 2005

Verfahren zur Bildung von Siliziumoxid durch elektrochemische Oxidation eines Halbleiter-Substrats mit Vertiefungen

Birner Albert; Goldbach Matthias


Archive | 2004

A method of forming a silicon dioxide layer

Sperl Irene; Birner Albert; Goldbach Matthias


Archive | 2004

Trench storage capacitor and method for fabricating it

Seidl Harald; Manger Dirk; Goldbach Matthias; Birner Albert; Slesazeck Stefan


Archive | 2003

Manufacturing method for dynamic random-access memory element with formation of memory cell field and control and evalaution circuit in vertically overlapping surface regions

Sell Bernhard; Goldbach Matthias; Luetzen Joern; Schloesser Till


Archive | 2003

Verfahren zur Bildung einer Hartmaske in einer Schicht auf einer flachen Scheibe

Manger Dirk; Goldbach Matthias

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