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Hecht Thomas

Infineon Technologies

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Publication

Featured researches published by Hecht Thomas.

Archive | 2001

Apparatus for depositing layers having atomic thickness on a substrate used in the semiconductor industry has a chamber wall arranged between two chamber regions to separate the chamber regions

Hecht Thomas; Gutsche Martin; Seidl Harald; Leonhardt Matthias

Archive | 2004

Verfahren zur Strukturierung keramischer Schichten auf Halbleitersubstanzen mit unebener Topographie

Seidl Harald; Gutsche Martin; Hecht Thomas; Jakschik Stefan; Kudelka Stephan; Schroeder Uwe; Schmeide Matthias

Archive | 2002

Trench capacitor used in semiconductor memory cell includes dielectric layer based on silicon nitride with subsequent thermal and chemical treatments

Seidl Harald; Gutsche Martin; Hecht Thomas; Leonhardt Matthias

Archive | 2006

METHOD FOR MANUFACTURING ELECTRONIC ELEMENT

Avellan Alejandro; Hecht Thomas; Jakschik Stefan; Schroeder Uwe

Archive | 2008

Verfahren zum Herstellen einer Halbleiterstruktur mit Kornelementen für einen Kondensator einer Speicherzelle

Hecht Thomas; Foerster Matthias; Birner Albert; Orth Andreas; Stadtmueller Michael

Archive | 2007

Herstellungsverfahren für Halbleiterstrukturen

Jakisch Stefan; Kapteyn Christian; Hecht Thomas

Archive | 2007

VERFAHRENHER ZUR HERSTELLUNG EINER ELEKTRODENANORDNUNG ZUR LADUNGSSPEICHERUNG

Goldbach Matthias; Hecht Thomas

Archive | 2005

Beschichtungsverfahren für strukturierte Substratoberflächen

Jakschik Stefan; Schroeder Uwe; Hecht Thomas

Archive | 2005

Grabenkondensator und Verfahren zur Herstellung desselben

Sell Bernhard; Goldbach Matthias; Luetzen Joern; Hecht Thomas

Archive | 2004

Production of trench capacitor for semiconductor memory cell comprises forming trench in semiconductor substrate using hard mask, partially masking upper trench region and further processing

Goldbach Matthias; Hecht Thomas; Birner Albert; Kudelka Stephan

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Collaboration

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Goldbach Matthias

Infineon Technologies

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Seidl Harald

Infineon Technologies

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Luetzen Joern

Infineon Technologies

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Sell Bernhard

Infineon Technologies

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Birner Albert

Infineon Technologies

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Gutsche Martin

Infineon Technologies

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Jakschik Stefan

Infineon Technologies

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Kudelka Stephan

Infineon Technologies

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Schroeder Uwe

IBM

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Leonhardt Matthias

Infineon Technologies

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