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Kudelka Stephan

Infineon Technologies

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Publication

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Archive | 2004

Verfahren zur Strukturierung keramischer Schichten auf Halbleitersubstanzen mit unebener Topographie

Seidl Harald; Gutsche Martin; Hecht Thomas; Jakschik Stefan; Kudelka Stephan; Schroeder Uwe; Schmeide Matthias

Archive | 2005

Herstellungsverfahren für einen Grabenkondensator mit einem Isolationskragen, der über einen vergrabenen Kontakt einseitig mit einem Substrat elektrisch verbunden ist, insbesondere für eine Halbleiterspeicherzelle

Kudelka Stephan; Saenger Annette; Seidl Harald; Popp Martin

Archive | 2003

Bildung einer vergrabenen Brücke ohne TTO-Abscheidung

Kudelka Stephan; Tews Helmut Horst

Archive | 2007

Grabenkondensator-Speicherzellenstruktur und Verfahren zum Ausbilden einer Grabenkondensator-Speicherzellenstruktur

Divakaruni Ramachandra; Fehlauer Gerd T; Kudelka Stephan; Mandelman Jack A; Schroeder Uwe; Tews Helmut

Archive | 2007

Storage capacitor for dynamic RAM memory module, has two memory electrodes, memory dielectric arranged between two memory electrodes, and intermediate layer made of pure carbon, where one electrode layer completely covers dielectric

Kapteyn Christian; Kudelka Stephan

Archive | 2007

VERFAHREN ZUR HERSTELLUNG EINER VERGRABENEN VERBINDUNG FÜR EINEN GRABENKONDENSATOR

Kudelka Stephan; Michaelis Alexander

Archive | 2005

Verfahren zum Aufweiten eines Grabens in einer Halbleiterstruktur

Kudelka Stephan

Archive | 2004

Production of trench capacitor for semiconductor memory cell comprises forming trench in semiconductor substrate using hard mask, partially masking upper trench region and further processing

Goldbach Matthias; Hecht Thomas; Birner Albert; Kudelka Stephan

Archive | 2004

METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE WITH TRENCH FOR TRENCH CAPACITOR

Birner Albert; Goldbach Matthias; Hecht Thomas; Heineck Lars; Kudelka Stephan; Lutzen Jorn; Manger Dirk; Orth Andreas

Archive | 2004

STRUCTURE AND METHOD OF INCREASING STORAGE CAPACITANCE IN SEMICONDUCTOR WAFER

Luetzen Joern; Birner Albert; Kudelka Stephan; Tews Helmut; Weis Rolf

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Birner Albert

Infineon Technologies

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Hecht Thomas

Infineon Technologies

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Goldbach Matthias

Infineon Technologies

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Michaelis Alexander

Infineon Technologies

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Schroeder Uwe

IBM

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Popp Martin

Infineon Technologies

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Seidl Harald

Infineon Technologies

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Tews Helmut Horst

Infineon Technologies

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Tews Helmut

IBM

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Andreas Orth

Infineon Technologies

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