Gongda Yao
Applied Materials
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Publication
Featured researches published by Gongda Yao.
Vacuum | 1998
Yoichiro Tanaka; Zheng Xu; Praburam Gopalraja; John C. Forster; Gongda Yao; Hong Zhang; Jaim Nulman; Fusen E. Chen
Abstract Ionized metal plasma (IMP) technology has been developed for liners and wetting layer deposition of sub-quarter-micron devices. Numerical modeling showed the unique advantages of IMP source over ECR source and long throw sputtering in enhancing bottom coverage. TiN bottom coverage up to 70% were demonstrated. The deposition rate, uniformity, bottom coverage and film stress were optimized by tuning rf and dc powers, process pressure and bias power. The TiN film microstructure such as crystal orientation and grain size was controlled by process parameters. An IMP TiN x ( x x wetting layer. The via resistance was improved by IMP Ti deposition.
Archive | 2004
Tony Chiang; Gongda Yao; Peijun Ding; Fusen E. Chen; Barry L. Chin; Gene Y. Kohara; Zheng Xu; Hong Zhang
Archive | 2005
Peijun Ding; Zheng Xu; Hong Zhang; Xianmin Tang; Praburam Gopalraja; Suraj Rengarajan; John C. Forster; Jianming Fu; Tony Chiang; Gongda Yao; Fusen E. Chen; Barry L. Chin; Gene Y. Kohara
Archive | 2006
Tony Chiang; Gongda Yao; Peijun Ding; Fusen E. Chen; Barry L. Chin; Gene Y. Kohara; Zheng Xu; Hong Zhang
Archive | 2005
Peijun Ding; Zheng Xu; Hong Zhang; Xianmin Tang; Praburam Gopalraja; Suraj Rengarajan; John C. Forster; Jianming Fu; Tony Chiang; Gongda Yao; Fusen E. Chen; Barry L. Chin; Gene Y. Kohara
Archive | 1997
Praburam Gopalraja; Ralf Hofmann; Avi Tepman; Gongda Yao
Archive | 2007
Peijun Ding; Zheng Xu; Hong Zhang; Xianmin Tang; Praburam Gopalraja; Suraj Rengarajan; John C. Forster; Jianming Fu; Tony Chiang; Gongda Yao; Fusen E. Chen; Barry L. Chin; Gene Y. Kohara
Archive | 2008
Peijun Ding; Zheng Xu; Hong Zhang; Xianmin Tang; Praburam Gopalraja; Suraj Rengarajan; John C. Forster; Jianming Fu; Tony Chiang; Gongda Yao; Fusen E. Chen; Barry L. Chin; Gene Y. Kohara
Archive | 2008
Fusen Chen; Tony Chiang; Barry Chin; Peijun Ding; Gene Y. Kohara; Zheng Xu; Gongda Yao; Hong Zhang; ツェン キュー; ジェネ コハラ; フセン チェン; トニー チャン; ホン チャン; バリー チン; ペイジュン ディン; ゴングダ ヤオ
Archive | 2009
Tony Chiang; Gongda Yao; Peijun Ding; Fusen E. Chen; Barry L. Chin; Gene Y. Kohara; Zheng Xu; Hong Zhang
