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Gregory Sexton

Lam Research

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Publication

Featured researches published by Gregory Sexton.

Archive | 2007

Bevel etcher with gap control

Andrew D. Bailey; Alan M. Schoepp; Gregory Sexton; Andras Kuthi; Yunsang Kim; William S. Kennedy

Archive | 2014

Back side deposition apparatus and applications

Yunsang Kim; Kaushik Chattopadhyay; Gregory Sexton; Youn Gi Hong

Archive | 2007

Configurable bevel etcher

Andrew D. Bailey; Alan M. Schoepp; Gregory Sexton; Yunsang Kim; William S. Kennedy

Archive | 2007

EDGE ELECTRODES WITH VARIABLE POWER

Gregory Sexton; Andrew D. Bailey; Andras Kuthi

Archive | 2007

Edge electrodes with dielectric covers

Gregory Sexton; Andrew D. Bailey; Andras Kuthi; Yunsang Kim

Archive | 2007

Bevel etcher with vacuum chuck

Andrew D. Bailey; Alan M. Schoepp; Gregory Sexton; William S. Kennedy

Archive | 2011

EXTENSION ELECTRODE OF PLASMA BEVEL ETCHING APPARATUS AND METHOD OF MANUFACTURE THEREOF

Gregory Sexton; Paul Aponte

Archive | 2007

Apparatus for defining regions of process exclusion and process performance in a process chamber

Andrew D. Bailey; Jack Chen; Yunsang Kim; Gregory Sexton

Archive | 2014

METHODS AND APPARATUS FOR BEVEL EDGE CLEANING IN A PLASMA PROCESSING SYSTEM

Jack Chen; Gregory Sexton; Yunsang Kim

Archive | 2007

Methods of and apparatus for aligning electrodes in a process chamber to protect an exclusion area within an edge environ of a wafer

Gregory Sexton; Andrew D. Bailey; Alan M. Schoepp; John D. Boniface

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Collaboration

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Andrew D. Bailey

Lam Research

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Yunsang Kim

Lam Research

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Alan M. Schoepp

Lam Research

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Andras Kuthi

Lam Research

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William S. Kennedy

Lam Research

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Jack Chen

Lam Research

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John D. Boniface

Lam Research

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Paul Aponte

Lam Research

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Adam Liron

Lam Research

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Kaushik Chattopadhyay

Lam Research

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