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Alan M. Schoepp

Lam Research

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Publication

Featured researches published by Alan M. Schoepp.

Archive | 1998

Chamber liner for semiconductor process chambers

Alan M. Schoepp; William M. Denty; Michael Barnes

Archive | 2002

High temperature electrostatic chuck

Greg Sexton; Mark Allen Kennard; Alan M. Schoepp

Archive | 1996

Plasma processing systems

Andrew D. Bailey; Alan M. Schoepp; David Hemker; Mark Wilcoxson; Andras Kuthi

Archive | 2013

DEPOSITION APPARATUS INCLUDING AN ISOTHERMAL PROCESSING ZONE

Ramesh Chandrasekharan; Jeremy Tucker; Karl Leeser; Alan M. Schoepp

Archive | 2007

Bevel etcher with gap control

Andrew D. Bailey; Alan M. Schoepp; Gregory Sexton; Andras Kuthi; Yunsang Kim; William S. Kennedy

Archive | 1998

Method and device for compensating wafer bias in a plasma processing chamber

Alan M. Schoepp; Robert Knop; Christopher Olson; Michael Barnes; Tuan M. Ngo

Archive | 2000

Method and apparatus for producing uniform process rates

Andrew D. Bailey; Alan M. Schoepp; Andras Kuthi

Archive | 2001

Temperature control system for plasma processing apparatus

Andrew D. Bailey; Alan M. Schoepp; Michael G. R. Smith; Andras Kuthi

Archive | 2000

Plasma processing system with dynamic gas distribution control

Andrew D. Bailey; Alan M. Schoepp; David Hemker; Mark Wilcoxson

Archive | 1999

Contamination controlling method and apparatus for a plasma processing chamber

Thomas E. Wicker; Alan M. Schoepp; Robert A. Maraschin

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Andrew D. Bailey

Lam Research

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David Hemker

Lam Research

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Mark Wilcoxson

Lam Research

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Andras Kuthi

Lam Research

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Gregory Sexton

Lam Research

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Fritz C. Redeker

Lam Research

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John M. Boyd

Lam Research

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John Parks

Lam Research

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Tiruchirapalli Arunagiri

Lam Research

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William S. Kennedy

Lam Research

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