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Günther Ruhl

Infineon Technologies

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Publication

Featured researches published by Günther Ruhl.

Nanoscale | 2016

Self-organized growth of graphene nanomesh with increased gas sensitivity

Matthias König; Günther Ruhl; Joerg-Martin Batke; Max C. Lemme

Archive | 2013

Composite Wafer and a Method for Manufacturing Same

Rudolf Berger; Hans-Joachim Schulze; Anton Mauder; Wolfgang Lehnert; Günther Ruhl; Roland Rupp

Archive | 2002

Production method for a halftone phase mask

Josef Mathuni; Günther Ruhl

Archive | 2014

Sensormodul und Batterieelemente

Klaus Elian; Horst Theuss; Günther Ruhl

Archive | 2013

Sensorbauelement und Verfahren

Klaus Elian; Günther Ruhl; Horst Theuss; Irmgard Escher-Poeppel

Archive | 2007

Lithography Apparatus, Masks for Non-Telecentric Exposure and Methods of Manufacturing Integrated Circuits

Sven Trogisch; Christoph Hohle; Wolf-Dieter Domke; Günther Ruhl

Archive | 2003

Process for the plasma etching of materials not containing silicon

Josef Mathuni; Günther Ruhl

Archive | 2014

Eine Vorrichtung zum Bestimmen eines Zustands eines Akkumulators oder einer Batterie, ein Akkumulator oder eine Batterie und ein Verfahren zum Bestimmen eines Zustands eines Akkumulators oder einer Batterie

Klaus Elian; Jochen Dangelmaier; Jürgen Hörgerl; Thomas Müller; Manfred Fries; Günther Ruhl; Horst Theuss; Mathias Vaupel

Archive | 2006

Producing halftone phase mask by providing mask on chromium oxide or chromium mask layer, etching chromium oxide or chromium mask layer, and selectively etching refractory metal silicon nitride phase shifter layer using hard mask in plasma

Josef Mathuni; Günther Ruhl

Archive | 2003

Method for compensating for scatter/reflection effects in particle beam lithography

Christian Ebi; Frank Erber; Torsten Franke; Fritz Gans; Tarek Lutz; Günther Ruhl; Bernd Schonherr

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Collaboration

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Hans-Joachim Schulze

Infineon Technologies

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Horst Theuss

Infineon Technologies

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Rudolf Berger

Infineon Technologies

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Klaus Elian

Infineon Technologies

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Roland Rupp

Infineon Technologies

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Josef Mathuni

Infineon Technologies

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Mathias Vaupel

Infineon Technologies

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Anton Mauder

Infineon Technologies

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Jochen Dangelmaier

Infineon Technologies

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Manfred Fries

Infineon Technologies

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