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Rodney Smedt

KLA-Tencor

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Publication

Featured researches published by Rodney Smedt.

Archive | 2012

Methods and systems for determining a critical dimension and overlay of a specimen

Ady Levy; Kyle A. Brown; Rodney Smedt; Gary Bultman; Mehrdad Nikoonahad; Dan Wack; Ibramhim Abdulhalim

Archive | 2007

Backside contamination inspection device

Rodney Smedt

Archive | 2001

Edge handling wafer chuck

Rodney Smedt; George L. Coad

Archive | 2001

Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen

Dan Wack; Ady Levy; Kyle A. Brown; Rodney Smedt; Gary Bultman; Mehrdad Nikoonahad

Archive | 2006

System for measuring periodic structures

Guoheng Zhao; Kenneth P. Gross; Rodney Smedt; Mehrdad Nikoonahad

Archive | 2001

Methods and systems for semiconductor fabrication processes

Ady Levy; Kyle A. Brown; Rodney Smedt; Mehrdad Nikoonahad; Gary Bultman; Dan Wack

Journal of the Acoustical Society of America | 2010

Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool

Paul J Sullivan; George Kren; Rodney Smedt; Hans Hansen; David W. Shortt; Daniel Kavaldjiev; Christopher F. Bevis

Archive | 2001

Improved system for measuring periodic structures

Guoheng Zhao; Kenneth P. Gross; Rodney Smedt; Mehrdad Nikoonahad

Archive | 2017

METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-ANGLE X-RAY REFLECTANCE SCATTEROMETRY (XRS)

Heath A. Pois; David A. Reed; Rodney Smedt; Jeffrey T. Fanton

Archive | 2016

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANALYSIS USING SECONDARY ION MASS SPECTROMETRY

David A. Reed; Bruce H. Newcome; Rodney Smedt; Chris Bevis

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Collaboration

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Mehrdad Nikoonahad

KLA-Tencor

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Ady Levy

KLA-Tencor

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Dan Wack

KLA-Tencor

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Gary Bultman

KLA-Tencor

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Kyle A. Brown

KLA-Tencor

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Guoheng Zhao

KLA-Tencor

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Christopher F. Bevis

KLA-Tencor

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Daniel Kavaldjiev

KLA-Tencor

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David W. Shortt

KLA-Tencor

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George Kren

KLA-Tencor

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