Kurt Lehman | Researchain

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Featured researches published by Kurt Lehman.

Archive | 2005

In-situ metalization monitoring using eddy current measurements during the process for removing the film

Kurt Lehman; Shing M. Lee; Walter H. Johnson

Archive | 2000

In-situ metalization monitoring using eddy current and optical measurements

Kurt Lehman; Shing M. Lee; Walter H. Johnson; Guoheng Zhao; Mehrdad Nikoonahad

Archive | 2006

Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool

Kurt Lehman; Charles Chen; Ronald L. Allen; Robert Shinagawa; Anantha Sethuraman; Christopher F. Bevis; Thanassis Trikas; Haiguang Chen; Ching Ling Meng

Archive | 1999

Apparatus and methods for performing self-clearing optical measurements

Mehrdad Nikoonahad; Shing M. Lee; Kalman Kele; Guoheng Zhao; Kurt Lehman

Archive | 1993

Eddy current test method and apparatus for measuring conductance by determining intersection of lift-off and selected curves

Chester L. Mallory; Walter H. Johnson; Kurt Lehman

Archive | 2003

Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing pad

Kurt Lehman; Charles Chen; Ronald L. Allen; Robert Shinagawa; Anantha Sethuraman; Christopher F. Bevis; Thanassis Trikas; Haiguang Chen; Ching Ling Meng

Archive | 2000

In-situ metalization monitoring using eddy current measurements and optical measurements

Kurt Lehman; Shing M. Lee; Walt Johnson; Guoheng Zhao; Mehrdad Nikoonahad

Archive | 2014

Integrated Multi-Channel Analog Front End And Digitizer For High Speed Imaging Applications

David L. Brown; Mansour Kermat; Lance Glasser; Henrik Nielsen; Guowu Zheng; Kurt Lehman; Kenneth Hatch; Alex Chuang; Venkatraman Iyer

Archive | 2003

Systems and methods for characterizing a polishing process

Kurt Lehman; Charles Chen; Ronald L. Allen; Robert Shinagawa; Anantha Sethuraman; Christopher F. Bevis; Thanassis Trikas; Haiguang Chen; Ching Ling Meng

Archive | 2003

Methods and systems for detecting a presence of blobs on a specimen during a polishing process

Kurt Lehman; Charles Chen; Ronald L. Allen; Robert Shinagawa; Anantha Sethuraman; Christopher F. Bevis; Thanassis Trikas; Haiguang Chen; Ching Ling Meng

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