Harald Kraus
Katholieke Universiteit Leuven
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Publication
Featured researches published by Harald Kraus.
Meeting Abstracts | 2007
Kaidong Xu; Guy Vereecke; Els Kesters; QuocToan Le; Marcel Lux; Sally-Ann Henry; Harald Kraus; Leo Archer; P. Mertens; Frederic Kovacs; Michael Dalmer; Ernst Gaulhofer; Shijian Luo; Qingyuan Han; Ivan Berry
With the implementation of Cu and low-κ dielectrics in back-end-of-line (BEOL), issues arise in every process step that must be addressed. One of the challenges is the susceptibility of Cu and low-κ materials to attack during residue removal (polymer) after low-κ etch and resist strip. This work focuses on the influence of the plasma etch and ash processes on compatibility of porous low-κ dielectrics with a selection of wet chemistries that are used for BEOL polymer removal.
Archive | 2005
Harald Kraus; M. Claes
Meeting Abstracts | 2007
Kaidong Xu; Anne Lauwers; Rita Vos; Leo Archer; Harald Kraus; Caroline Demeurisse; Sofie Mertens; Sally-Ann Henry; Glenn W. Gale; P. Mertens; Frederic Kovacs; Michael Dalmer; Ernst Gaulhofer
Semiconductor Fabtech | 2005
Jim Snow; Harald Kraus; F Kovacs; Martine Claes; Vasile Paraschiv; Rita Vos; Paul Mertens; Stefan De Gendt; Marc Heyns; Leo Archer
Archive | 2004
Harald Kraus; Jim Snow; Patrick Van Doorne; Wim Fyen; Paul Mertens; Frederic Kovacs
Archive | 2004
Harald Kraus; Jim Snow; Paul Mertens; Frank Holsteyns; Karine Kenis; F Kovacs; S Fichtl
Archive | 2004
Paul Mertens; Rita Vos; Guy Vereecke; Sophia Arnauts; Twan Bearda; Rita De Waele; Atsuro Eitoku; Wim Fyen; J Geckiere; David Hellin; Frank Holsteyns; Els Kesters; Martine Claes; Karine Kenis; Harald Kraus; Stephane Malhouitre; Kun-tack Lee; Michael Kocsis; Bart Onsia; Sylvain Garaud; Jens Rip; Jim Snow; Ivo Teerlinck; Jan Van Hoeymissen; Francesca Barbagini; Kaidong Xu; Vasile Paraschiv; Stefan De Gendt; G. Mannaert; Marc Heyns
Archive | 2004
Martine Claes; Vasile Paraschiv; S. Beckx; Marc Demand; Wim Deweerd; Sylvain Garaud; Harald Kraus; Rita Vos; Jim Snow; Werner Boullart; Stefan De Gendt
Archive | 2004
Harald Kraus; F Kovacs; Jim Snow; Martine Claes; Vasile Paraschiv; Rita Vos; Paul Mertens; Stefan De Gendt; Marc Heyns
Archive | 2004
Wim Fyen; Kaidong Xu; Jan Van Steenbergen; Guy Vereecke; Rita Vos; Sophia Arnauts; Jens Rip; Karine Kenis; Frank Holsteyns; David Hellin; Geert Doumen; Paul Mertens; Harald Kraus; Kim Lee
