Heiko Hommen

Arrangement for transferring information/structures to wafers

Method for controlling a processing device for a sequential processing of semiconductor wafers

Method for determining the relative positional accuracy of two structure elements on a wafer

Alignment mark for coarse alignment and fine alignment of a semiconductor wafer in an exposure tool

Method for exposing at least one or at least two semiconductor wafers

Anordnung zum Übertragen von Informationen/Strukturen auf Wafer unter Verwendung eines Stempels

Appliance for transfer of information or structures onto wafer, using stamp with raised structures produced by suitable method, e.g. photolithography in conjunction with etching

Method for carrying out a double or multiple exposure

Method for controlling a process appliance for the sequential processing of semiconductor wafers

Verfahren zur Steuerung eines Prozeßgerätes zur sequentiellen Verarbeitung von Halbleiterwafern