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Heiko Hommen

Infineon Technologies

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Publication

Featured researches published by Heiko Hommen.

Archive | 2004

Arrangement for transferring information/structures to wafers

Jens Staecker; Uwe Bruch; Heiko Hommen

Archive | 2002

Method for controlling a processing device for a sequential processing of semiconductor wafers

Thorsten Schedel; Karl Schumacher; Thomas Fischer; Heiko Hommen; Ralf Otto; Sebastian Schmidt

Archive | 2004

Method for determining the relative positional accuracy of two structure elements on a wafer

Heiko Hommen; Jens Stäcker; Maria de la Piedad Fernandez-Martinez; Jens Uwe Bruch; Thorsten Schedel

Archive | 2004

Alignment mark for coarse alignment and fine alignment of a semiconductor wafer in an exposure tool

Diana Mattiza; Heiko Hommen; Holger Hasse

Archive | 2003

Method for exposing at least one or at least two semiconductor wafers

Heiko Hommen; Ralf Otto; Thorsten Schedel; Sebastian Schmidt; Thomas Fischer

Archive | 2003

Anordnung zum Übertragen von Informationen/Strukturen auf Wafer unter Verwendung eines Stempels

Jens Staecker; Jens Uwe Bruch; Heiko Hommen

Archive | 2003

Appliance for transfer of information or structures onto wafer, using stamp with raised structures produced by suitable method, e.g. photolithography in conjunction with etching

Jens Uwe Bruch; Heiko Hommen; Jens Stäcker

Archive | 2004

Method for carrying out a double or multiple exposure

Jens Stäcker; Heiko Hommen; Jens Uwe Bruch; Marlene Strobl; Karl Schumacher

Archive | 2002

Method for controlling a process appliance for the sequential processing of semiconductor wafers

Thorsten Schedel; Karl Schumacher; Thomas Fischer; Heiko Hommen; Ralf Otto; Sebastian Schmidt

Archive | 2001

Verfahren zur Steuerung eines Prozeßgerätes zur sequentiellen Verarbeitung von Halbleiterwafern

Thomas Fischer; Thorsten Schedel; Karl Schumacher; Heiko Hommen; Ralf Otto; Sebastian Schmidt

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Collaboration

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Karl Schumacher

Infineon Technologies

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Jens Stäcker

Infineon Technologies

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Jens Uwe Bruch

Infineon Technologies

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Jens Staecker

Infineon Technologies

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Thorsten Schedel

Infineon Technologies

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Ralf Otto

Infineon Technologies

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Sebastian Schmidt

Infineon Technologies

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Thomas Fischer

Infineon Technologies

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Diana Mattiza

Infineon Technologies

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Holger Hasse

Infineon Technologies

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