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Jens Stäcker

Infineon Technologies

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Publication

Featured researches published by Jens Stäcker.

Archive | 2004

Method and apparatus for orienting semiconductor wafers in semiconductor fabrication

Jens Stäcker

Archive | 2004

Method for determining the relative positional accuracy of two structure elements on a wafer

Heiko Hommen; Jens Stäcker; Maria de la Piedad Fernandez-Martinez; Jens Uwe Bruch; Thorsten Schedel

Archive | 2003

Method for aligning and exposing a semiconductor wafer

Martin Rössiger; Thorsten Schedel; Jens Stäcker

Archive | 2003

Appliance for transfer of information or structures onto wafer, using stamp with raised structures produced by suitable method, e.g. photolithography in conjunction with etching

Jens Uwe Bruch; Heiko Hommen; Jens Stäcker

Archive | 2004

Semiconductor wafer alignment method, by correcting optically measured position information for adjustment mark using line profile of adjustment mark

Jens Stäcker

Archive | 2004

Method for carrying out a double or multiple exposure

Jens Stäcker; Heiko Hommen; Jens Uwe Bruch; Marlene Strobl; Karl Schumacher

Archive | 2006

Method for fastening substrate at substrate holder involves laying of first side of substrate on substrate holder, setting of first fluid pressure at first sub range of first side of substrate and setting of second fluid pressure

Jens Uwe Bruch; Jens Stäcker; Heiko Hommen; Karl Schumacher; Roberto Schiwon; Martin Schmidt-Lanz; Dirk Efferenn

Archive | 2005

Maske, Maskensubstrathalter und Verfahren zur Durchführung einer Doppel- oder Mehrfachbelichtung mit der Maske und dem Maskensubstrathalter

Marlene Strobl; Karl Schumacher; Jens Stäcker; Jens Uwe Bruch; Heiko Hommen

Archive | 2003

Method of exposing a semiconductor wafer in an exposer

Jens Stäcker; Heiko Hommen

Archive | 2005

Photomaske und Verfahren zur Verwendung der Photomaske in einer Belichtungsanlage

Lothar Bauch; Anja Bonness; Jens Uwe Bruch; Stefan Geyer; Heiko Hommen; Patrick Klingbeil; Dieter Nees; Roberto Schiwon; Karl Schumacher; Jens Stäcker

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Collaboration

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Heiko Hommen

Infineon Technologies

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Jens Uwe Bruch

Infineon Technologies

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Karl Schumacher

Infineon Technologies

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Thorsten Schedel

Infineon Technologies

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Marlene Strobl

Infineon Technologies

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Martin Rössiger

Infineon Technologies

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Roberto Schiwon

Infineon Technologies

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Anja Bonness

Infineon Technologies

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Dieter Nees

Infineon Technologies

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Hans-Georg Froehlich

Infineon Technologies

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