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Helen Rebenne

Tokyo Electron

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Publication

Featured researches published by Helen Rebenne.

Archive | 1992

Semiconductor wafer processing method and apparatus with heat and gas flow control

Robert F. Foster; Helen Rebenne; Rene E. Leblanc; Carl White; Rikhit Arora

Archive | 1992

Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVD

Robert F. Foster; Helen Rebenne; Rene E. Leblanc; Carl White; Rikhit Arora

Archive | 1993

Semiconductor wafer processing cvd reactor cleaning method and apparatus

Robert F. Foster; Helen Rebenne; Rene E. Leblanc; Carl White; Rikhit Arora

Archive | 1993

Rotierende halterung als maschinenteil für die bearbeitung von halbleiterplättchen, einsetzbar bei der chemischen gasphasenabscheidung von wolfram

Rikhit Arora; Robert F. Foster; Rene E. Leblanc; Helen Rebenne; Carl White

Archive | 1993

Procede et appareil d'epuration d'un reacteur par procede cvd dans le traitement de tranches a semi-conducteurs.

Robert F. Foster; Helen Rebenne; Rene E. Leblanc; Carl White; Rikhit Arora

Archive | 1993

Procede et appareil de traitement de tranches de semi-conducteurs a regulation du flux thermique et gazeux

Rikhit Arora; Robert F. Foster; Rene E. Leblanc; Helen Rebenne; Carl White

Archive | 1993

Rotierende halterung als maschinenteil für die bearbeitung von halbleiterplättchen, einsetzbar bei der chemischen gasphasenabscheidung von wolfram Rotating holder tungsten as a machine part for machining semiconductor plate, used in the chemical gas phase deposition of

Robert F. Foster; Helen Rebenne; Rene E. Leblanc; Carl White; Rikhit Arora

Archive | 1993

Procedes de depot chimique en phase vapeur de films sur plaquettes a motifs formes

Robert F. Foster; Helen Rebenne

Archive | 1993

Methode zur behandlung von halbleiter-wafern und apparat mit kontolle des waerme- und des gasflusses Method for the treatment of semiconductor wafers and apparatus with control of the conditions-heat, and the gas flow

Robert F. Foster; Helen Rebenne; Rene E. Leblanc; Carl White; Rikhit Arora

Archive | 1993

Reactor for the production of halbleiterplaettchen by vapor deposition

Robert F. Foster; Helen Rebenne; Rene E. Leblanc; Carl White; Rikhit Arora

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Robert F. Foster

Tokyo Electron

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Carl White

Tokyo Electron

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Rene E. Leblanc

Tokyo Electron

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Rikhit Arora

Tokyo Electron

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