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Rene E. Leblanc

Tokyo Electron

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Publication

Featured researches published by Rene E. Leblanc.

Archive | 1997

Apparatus and method for preventing the premature mixture of reactant gases in CVD and PECVD reactions

Stanislaw Kopacz; Douglas Arthur Webb; Gerrit J. Leusink; Rene E. Leblanc; Michael S. Ameen; Joseph T. Hillman; Robert F. Foster; Robert C. Rowan

Archive | 1992

Semiconductor wafer processing method and apparatus with heat and gas flow control

Robert F. Foster; Helen Rebenne; Rene E. Leblanc; Carl White; Rikhit Arora

Archive | 1992

Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVD

Robert F. Foster; Helen Rebenne; Rene E. Leblanc; Carl White; Rikhit Arora

Archive | 1998

Apparatus for producing thin films by low temperature plasma-enhanced chemical vapor deposition

Robert F. Foster; Joseph T. Hillman; Rene E. Leblanc

Archive | 1993

Semiconductor wafer processing cvd reactor cleaning method and apparatus

Robert F. Foster; Helen Rebenne; Rene E. Leblanc; Carl White; Rikhit Arora

Archive | 1994

Method and apparatus for producing thin films

Robert F. Foster; Joseph T. Hillman; Rene E. Leblanc

Archive | 1993

Rotierende halterung als maschinenteil für die bearbeitung von halbleiterplättchen, einsetzbar bei der chemischen gasphasenabscheidung von wolfram

Rikhit Arora; Robert F. Foster; Rene E. Leblanc; Helen Rebenne; Carl White

Archive | 1994

Procede et appareil de depot d'une couche mince sur un substrat

Robert F. Foster; Joseph T. Hillman; Rene E. Leblanc

Archive | 1994

Verfahren und Vorrichtung zur Herstellung von Dünnfilmen

Robert F. Foster; Rene E. Leblanc; Joseph T. Hillman

Archive | 1994

Verfahren und Vorrichtung zur Herstellung von Dünnfilmen Method and apparatus for production of thin films

Robert F. Foster; Rene E. Leblanc; Joseph T. Hillman

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Collaboration

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Robert F. Foster

Tokyo Electron

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Carl White

Tokyo Electron

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Helen Rebenne

Tokyo Electron

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Rikhit Arora

Tokyo Electron

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Joseph T. Hillman

Tokyo Electron

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Douglas Arthur Webb

Tokyo Electron

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Gerrit J. Leusink

Tokyo Electron

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Michael S. Ameen

Tokyo Electron

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Robert C. Rowan

Tokyo Electron

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Stanislaw Kopacz

Tokyo Electron

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