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Rikhit Arora

Tokyo Electron

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Publication

Featured researches published by Rikhit Arora.

Archive | 1994

Method and apparatus for low temperature deposition of CVD and PECVD films

Robert F. Foster; Joseph T. Hillman; Rikhit Arora

Archive | 1992

Semiconductor wafer processing method and apparatus with heat and gas flow control

Robert F. Foster; Helen Rebenne; Rene E. Leblanc; Carl White; Rikhit Arora

Archive | 1992

Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVD

Robert F. Foster; Helen Rebenne; Rene E. Leblanc; Carl White; Rikhit Arora

Archive | 1995

Process for plasma enhanced anneal of titanium nitride

Robert F. Foster; Joseph T. Hillman; Rikhit Arora

Archive | 1993

Semiconductor wafer processing cvd reactor cleaning method and apparatus

Robert F. Foster; Helen Rebenne; Rene E. Leblanc; Carl White; Rikhit Arora

Archive | 1993

Rotierende halterung als maschinenteil für die bearbeitung von halbleiterplättchen, einsetzbar bei der chemischen gasphasenabscheidung von wolfram

Rikhit Arora; Robert F. Foster; Rene E. Leblanc; Helen Rebenne; Carl White

Archive | 1996

Verfahren zur plasma aktivierten wärmebehandlung von titannitrid A method for plasma-activated heat treatment of titanium nitride

Robert F. Foster; Joseph T. Hillman; Rikhit Arora

Archive | 1995

Plasmaverstärkte chemische Gasphasenabscheidung von Titannitrid unter der Verwendung von Ammoniak Plasma enhanced chemical vapor deposition of titanium nitride using ammonia

Robert F. Foster; Rikhit Arora; Joseph T. Hillman

Archive | 1995

Plasmaverstärkte chemische Gasphasenabscheidung von Titannitrid unter der Verwendung von Ammoniak

Robert F. Foster; Rikhit Arora; Joseph T. Hillman

Archive | 1994

Verfahren und vorrichtung für die niedertemperatur-ablagerung von cvd- und pecvd-filmen Method and apparatus for the low temperature deposition of CVD and PECVD films

Robert F. Foster; Joseph T. Hillman; Rikhit Arora

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Robert F. Foster

Tokyo Electron

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Carl White

Tokyo Electron

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Helen Rebenne

Tokyo Electron

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Rene E. Leblanc

Tokyo Electron

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Joseph T. Hillman

Tokyo Electron

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