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Dive into the research topics where Kurt Weiblen is active.

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Featured researches published by Kurt Weiblen.


Sensors and Actuators A-physical | 1997

Simulation of thermally induced package effects with regard to piezoresistive pressure sensors

Frank Schilling; Werner Langheinrich; Kurt Weiblen; Dieter Arand

Abstract Microsystems are on their way out of laboratories into production. One of these microsystems, a piezoresistive pressure sensor developed by Robert Bosch GmbH, is examined within this paper. Obviously, one can detect undesirable temperature effects resulting from the sensor package, which influence the electrical characteristics of the sensor. By means of finite-element modelling (FEM), a simulation of the temperature effects can be managed. It is also possible to search for alternative designs of the sensor package.


Archive | 1993

Mass flow sensor

Hans Hecht; Wolfgang Kienzle; Rudolf Sauer; Eckart Reihlen; Kurt Weiblen


Archive | 1998

Wafer stack and method of producing sensors

Jürgen Kurle; Kurt Weiblen; Stefan Pinter; Horst Muenzel; Helmut Baumann; Dietrich Schubert; Karl Bender; Markus Lutz


Archive | 2005

Method for packaging semiconductor chips and corresponding semiconductor chip system

Kurt Weiblen; Hubert Benzel; Stefan Pinter; Roland Guenschel; Frieder Haag


Archive | 1992

Method of assembling micromechanical sensors

Rolf Becker; Klaus Jaeckel; Jiri Marek; Frank Bantien; Helmut Baumann; Kurt Weiblen; Martin Willmann


Archive | 2000

Method for manufacturing a pressure sensor

Kurt Weiblen; Anton Doering; Juergen Nieder; Frieder Haag


Archive | 1996

Angular velocity sensor with built-in limit stops

Juergen Kurle; Kurt Weiblen; Horst Muenzel; Helmut Baumann; Klaus Heyers; Markus Lutz


Archive | 1992

Mass flow sensor - mounts heater and temp. sensor on dielectric membrane supported by etched single silicon@ crystal frame provided with wire bonding pads, and locates assembly in housing which provides flow channel.

Wolfgang Kienzle; Rudolf Dipl Ing Dr Sauer; Hans Hecht; Kurt Weiblen; Eckart Reihlen


Archive | 1995

Device having a mounting board and method for applying a passivating gel

Kurt Weiblen; Bertram Woessner


Archive | 1992

Silicon chip for use in a force-detection sensor

Jiri Marek; Frank Bantien; Steffen Schmidt; Kurt Weiblen; Matthias Kuesell; Werner Herden

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