Herpen Maarten Marinus Johannes Wilhelmus Van

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Herpen Maarten Marinus Johannes Wilhelmus Van is active.

Explore More

Publication

Featured researches published by Herpen Maarten Marinus Johannes Wilhelmus Van.

Archive | 2005

Method for the protection of an optical element, device manufacturing method, and lithographic apparatus including an optical element

Herpen Maarten Marinus Johannes Wilhelmus Van; Vadim Yevgenyevich Banine; Johannes Hubertus Josephina Moors; Carolus Ida Maria Antonius Spee; Derk Jan Wilfred Klunder; Peter Cornelis Zalm

Archive | 2005

Spectral purity filter, lithography device equipped with such spectral purity filter, method for manufacturing device and device manufactured by such device manufacturing method

Derk Jan Wilfred Klunder; Herpen Maarten Marinus Johannes Wilhelmus Van; ヤンヴィルフレッドクルンデルデレク; マリヌスヨハネスヴィルヘルヌスファンヘルペンマールテン

Archive | 2006

Spectral purification filter for multilayer mirror, lithography apparatus comprising such multilayer mirror, method of increasing ratio of desired radiation to undesired radiation and manufacturing method of device

Levinus Pieter Bakker; Vadim Yevgenyevich Banine; Derk Jan Wilfred Klunder; Herpen Maarten Marinus Johannes Wilhelmus Van; ヤンヴィルフレッドクルンデルデルク; イェフゲンイェフィヒバニネファディム; マリヌスヨハネスヴィルヘルムスファンヘルペンマールテン; ピーターバッケルレフィヌス

Archive | 2005

Method to remove things deposited in optical elements, method to protect optical elements, device manufacturing method, apparatus containing optical elements, and lithography apparatus

Derk Jan Wilfred Klunder; Johannes Hubertus Josephina Moors; Carolus Ida Maria Antonius Spee; Yevgenyevich Banine Vadim; Herpen Maarten Marinus Johannes Wilhelmus Van; Peter Cornelis Zalm; アイダマリアアントニウスシュペーカロルス; ヤンヴィルフレッドクレンデルデルク; イェフゲンイェフィチバニーネファディム; コーネリスツァルムペーター; マリヌスヨハネスウィルヘルムスファンヘルペンマールテン; フベルトゥスジョセフィーナムーアヨハネス

Archive | 2007

Getter and cleaning arrangement for a lithographic apparatus

Herpen Maarten Marinus Johannes Wilhelmus Van; Vadim Yevgenyevich Banine; Johannes Hubertus Josephina Moors; Wouter Anthon Soer

Archive | 2007

Arrangement for cleaning a surface in a lithographic apparatus

Herpen Maarten Marinus Johannes Wilhelmus Van; Derk Jan Wilfred Klunder

Archive | 2008

Method for removal of deposition on optical element, method for protection of optical element, device manufacturing method, apparatus including optical element, and lithographic apparatus

Archive | 2006

Method of removing deposit on optical element, method of protecting optical element, method of manufacturing device, apparatus including optical element, and lithographic apparatus

Derk Jan Wilfred Klunder; Carolus Ida Maria Antonius Spee; Herpen Maarten Marinus Johannes Wilhelmus Van; Mol Antonius Maria Bernardus Van; マリアベルナルドゥスファンモルアントニウス; アイダマリアアントニウスシュペーカロルス; ヤンヴィルフレッドクルンデルデルク; マリヌスヨハネスヴィルヘルムスファンヘルペンマールテン

Archive | 2006

Method of cleaning lithographic apparatus module, cleaning structure for lithographic apparatus module, and lithographic apparatus equipped with cleaning structure

Vadim Yevgenyevich Banine; Johannes Maria Freriks; Vladimir Vitalevitch Ivanov; Derk Jan Wilfred Klunder; Herpen Maarten Marinus Johannes Wilhelmus Van; ビターレビッチイワノフ，ウラジミール; ハーペン，マーテンマリヌスヨハネスウィルヘルムスヴァン; ジャンウィルフレッドクランダー，デルク; エヴィジェンエビッチバニエ，バディム; マリアフレリックス，ヨハネス

Archive | 2007