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Latest external collaboration on country level. Dive into details by clicking on the dots.

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Dive into the research topics where Hideki Kihara is active.

Publication


Featured researches published by Hideki Kihara.


Archive | 2010

Vacuum processing apparatus

Akitaka Makino; Youji Takahashi; Minoru Soraoka; Hideki Kihara; Susumu Tauchi


Archive | 2005

Plasma processing apparatus and method

Ryoji Nishio; Ken Yoshioka; Saburou Kanai; Tadamitsu Kanekiyo; Hideki Kihara; Koji Okuda


Archive | 1994

Microwave plasma processing apparatus and method

Yoshiaki Sato; Mitsuru Katamoto; Hironobu Kawahara; Minoru Soraoka; Tsuyoshi Umemoto; Hideki Kihara; Katsuyoshi Kudo; Tooru Yukimasa; Hirofumi Kakutani


Archive | 2000

Method and apparatus for controlling temperature of sample stage, and method and apparatus for processing sample

Takamitsu Kanekiyo; Hideki Kihara; Eiji Maruyama; Tsutomu Tauchi; Tsunehiko Tsubone; 英治 丸山; 恒彦 坪根; 秀樹 木原; 勤 田内; 任光 金清


Archive | 2006

Vacuum processing method and vacuum processing apparatus

Nobuo Nagayasu; Hideki Kihara; Michinori Kawaguchi; Yuuzou Oohirabaru


Archive | 2005

Vacuum processing method or device

Michinori Kawaguchi; Hideki Kihara; Nobuo Nagayasu; Yuuzou Oohirahara; 勇造 大平原; 道則 川口; 秀樹 木原; 伸男 永安


Archive | 2008

Vacuum treatment method and vacuum carrier

Hideki Kihara; Nobuo Nagayasu; 秀樹 木原; 伸男 永安


Archive | 2007

Vacuum processing apparatus and vacuum processing method of sample

Tooru Aramaki; Tsunehiko Tsubone; Tadamitsu Kanekiyo; Shigeru Shirayone; Hideki Kihara


Archive | 1999

CLEANING METHOD FOR PLASMA TREATMENT CHAMBER

Mitsuru Katamoto; Hironori Kawahara; Hideki Kihara; Katsuyoshi Kudo; Minoru Soraoka; Hirofumi Sumiya; Tsuyoshi Umemoto; Toru Yukimasa; 博宣 川原; 勝義 工藤; 秀樹 木原; 強志 梅本; 満 片本; 稔 空岡; 亨 行正; 裕文 角谷


Archive | 2011

Wafer processing based on sensor detection and system learning

Tomohiro Ohashi; Akitaka Makino; Hiroho Kitada; Hideki Kihara

Collaboration


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