Hideki Kihara | Researchain

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Featured researches published by Hideki Kihara.

Archive | 2010

Vacuum processing apparatus

Akitaka Makino; Youji Takahashi; Minoru Soraoka; Hideki Kihara; Susumu Tauchi

Archive | 2005

Plasma processing apparatus and method

Ryoji Nishio; Ken Yoshioka; Saburou Kanai; Tadamitsu Kanekiyo; Hideki Kihara; Koji Okuda

Archive | 1994

Microwave plasma processing apparatus and method

Yoshiaki Sato; Mitsuru Katamoto; Hironobu Kawahara; Minoru Soraoka; Tsuyoshi Umemoto; Hideki Kihara; Katsuyoshi Kudo; Tooru Yukimasa; Hirofumi Kakutani

Archive | 2000

Method and apparatus for controlling temperature of sample stage, and method and apparatus for processing sample

Takamitsu Kanekiyo; Hideki Kihara; Eiji Maruyama; Tsutomu Tauchi; Tsunehiko Tsubone; 英治丸山; 恒彦坪根; 秀樹木原; 勤田内; 任光金清

Archive | 2006

Vacuum processing method and vacuum processing apparatus

Nobuo Nagayasu; Hideki Kihara; Michinori Kawaguchi; Yuuzou Oohirabaru

Archive | 2005

Vacuum processing method or device

Michinori Kawaguchi; Hideki Kihara; Nobuo Nagayasu; Yuuzou Oohirahara; 勇造大平原; 道則川口; 秀樹木原; 伸男永安

Archive | 2008

Vacuum treatment method and vacuum carrier

Hideki Kihara; Nobuo Nagayasu; 秀樹木原; 伸男永安

Archive | 2007

Vacuum processing apparatus and vacuum processing method of sample

Tooru Aramaki; Tsunehiko Tsubone; Tadamitsu Kanekiyo; Shigeru Shirayone; Hideki Kihara

Archive | 1999

CLEANING METHOD FOR PLASMA TREATMENT CHAMBER

Mitsuru Katamoto; Hironori Kawahara; Hideki Kihara; Katsuyoshi Kudo; Minoru Soraoka; Hirofumi Sumiya; Tsuyoshi Umemoto; Toru Yukimasa; 博宣川原; 勝義工藤; 秀樹木原; 強志梅本; 満片本; 稔空岡; 亨行正; 裕文角谷

Archive | 2011