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Dive into the research topics where Minoru Soraoka is active.

Publication


Featured researches published by Minoru Soraoka.


Archive | 2010

Vacuum processing apparatus

Akitaka Makino; Youji Takahashi; Minoru Soraoka; Hideki Kihara; Susumu Tauchi


Archive | 2001

Vacuum processing apparatus and semiconductor manufacturing line using the same

Minoru Soraoka; Ken Yoshioka; Yoshinao Kawasaki


Archive | 1994

Microwave plasma processing apparatus and method

Yoshiaki Sato; Mitsuru Katamoto; Hironobu Kawahara; Minoru Soraoka; Tsuyoshi Umemoto; Hideki Kihara; Katsuyoshi Kudo; Tooru Yukimasa; Hirofumi Kakutani


Archive | 1987

Method of detecting an end point of plasma treatment

Shoji Ikuhara; Keiji Tada; Yoshinao Kawasaki; Katsuyoshi Kudo; Minoru Soraoka


Archive | 1984

Wafer gripping device

Minoru Soraoka


Archive | 1995

Vacuum processor and semiconductor production line using the processor

Yoshinao Kawasaki; Minoru Soraoka; Takeshi Yoshioka; 健 吉岡; 義直 川崎; 稔 空岡


Archive | 1999

CLEANING METHOD FOR PLASMA TREATMENT CHAMBER

Mitsuru Katamoto; Hironori Kawahara; Hideki Kihara; Katsuyoshi Kudo; Minoru Soraoka; Hirofumi Sumiya; Tsuyoshi Umemoto; Toru Yukimasa; 博宣 川原; 勝義 工藤; 秀樹 木原; 強志 梅本; 満 片本; 稔 空岡; 亨 行正; 裕文 角谷


Archive | 2001

Vacuum processing apparatus and semiconductor manafacturing line using the same

Minoru Soraoka; Ken Yoshioka; Yoshinao Kawasaki


Archive | 2001

Vacuum processing apparatus for coping with larger diameter samples while keeping manufacturing cost to minimum and semiconductor manufacturing line using the same

Minoru Soraoka; Ken Yoshioka; Yoshinao Kawasaki


Archive | 1996

Vakuumbehandlungsanlage und Halbleiterfertigungsstrasse die diese verwendet

Minoru Soraoka; Ken Yoshioka; Yoshinao Kawasaki

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