Minoru Soraoka | Researchain

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Featured researches published by Minoru Soraoka.

Archive | 2010

Vacuum processing apparatus

Akitaka Makino; Youji Takahashi; Minoru Soraoka; Hideki Kihara; Susumu Tauchi

Archive | 2001

Vacuum processing apparatus and semiconductor manufacturing line using the same

Minoru Soraoka; Ken Yoshioka; Yoshinao Kawasaki

Archive | 1994

Microwave plasma processing apparatus and method

Yoshiaki Sato; Mitsuru Katamoto; Hironobu Kawahara; Minoru Soraoka; Tsuyoshi Umemoto; Hideki Kihara; Katsuyoshi Kudo; Tooru Yukimasa; Hirofumi Kakutani

Archive | 1987

Method of detecting an end point of plasma treatment

Shoji Ikuhara; Keiji Tada; Yoshinao Kawasaki; Katsuyoshi Kudo; Minoru Soraoka

Archive | 1984

Wafer gripping device

Minoru Soraoka

Archive | 1995

Vacuum processor and semiconductor production line using the processor

Yoshinao Kawasaki; Minoru Soraoka; Takeshi Yoshioka; 健吉岡; 義直川崎; 稔空岡

Archive | 1999

CLEANING METHOD FOR PLASMA TREATMENT CHAMBER

Mitsuru Katamoto; Hironori Kawahara; Hideki Kihara; Katsuyoshi Kudo; Minoru Soraoka; Hirofumi Sumiya; Tsuyoshi Umemoto; Toru Yukimasa; 博宣川原; 勝義工藤; 秀樹木原; 強志梅本; 満片本; 稔空岡; 亨行正; 裕文角谷

Archive | 2001