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Dive into the research topics where Akitaka Makino is active.

Publication


Featured researches published by Akitaka Makino.


Archive | 2010

Vacuum processing apparatus

Akitaka Makino; Youji Takahashi; Minoru Soraoka; Hideki Kihara; Susumu Tauchi


Archive | 2005

Electrode cover for a plasma processing apparatus

Takeo Uchino; Hiroyuki Shichida; Masakazu Isozaki; Tsunehiko Tsubone; Akitaka Makino


Archive | 1993

Method of and apparatus for securing and cooling/heating a wafer

Hiroyuki Shichida; Naoyuki Tamura; Akitaka Makino


Archive | 2001

Apparatus and method for plasma treating

Manabu Edamura; Kazuyuki Ikenaga; Akitaka Makino; Hideyuki Yamamoto; 秀之 山本; 学 枝村; 和幸 池永; 昭孝 牧野


Archive | 2007

Grounded electrode for a plasma processing apparatus

Tsutomu Nakamura; Susumu Tauchi; Akitaka Makino


Archive | 2005

Cover ring for a plasma processing apparatus

Tsutomu Nakamura; Susumu Tauchi; Akitaka Makino


Thin Solid Films | 2007

Controlling gate-CD uniformity by means of a CD prediction model and wafer-temperature distribution control

Seiichiro Kanno; Go Miya; Junichi Tanaka; Toru Masuda; K. Kuwahara; M. Sakaguchi; Akitaka Makino; Tsunehiko Tsubone; T. Fujii


Archive | 2003

TEST PIECE SETTING DEVICE FOR VACUUM PROCESSING APPARATUS

Akitaka Makino; Eiji Maruyama; Nobuo Nagayasu; 英治 丸山; 伸夫 永安; 昭孝 牧野


Archive | 2008

Plasma processing apparatus capable of adjusting pressure within processing chamber

Michiaki Kobayashi; Tsutomu Nakamura; Akitaka Makino


Archive | 2004

APPARATUS AND METHOD OF PLASMA PROCESSING

Takuji Kaneko; Akitaka Makino; Koichi Mishima; Toyoji Okumoto; 浩一 三嶋; 豊治 奥本; 昭孝 牧野; 卓司 金子

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