Is this you? Create Your Porfile
Avatar

Hideto Yamaguchi

Hitachi

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Hideto Yamaguchi is active.

Explore More

Publication

Featured researches published by Hideto Yamaguchi.

Archive | 1999

Mobile communication unit and mobile communication system

Masaki Tanaka; Kenzo Urabe; Seigo Miyoshi; Yoshikuni Itoh; Hideto Yamaguchi

Archive | 1999

Semiconductor producing apparatus and temperature control method therefor

Hideto Yamaguchi; Kazuo Tanaka; Kenzo Urabe

Archive | 2001

Temperature controlling method, thermal treating apparatus, and method of manufacturing semiconductor device

Kazuo Tanaka; Masaaki Ueno; Minoru Nakano; Hideto Yamaguchi

Archive | 2011

SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROLLING METHOD OF SUBSTRATE PROCESSING APPARATUS, AND HEATING METHOD OF SUBSTRATE PROCESSING APPARATUS

Shinobu Sugiura; Masaaki Ueno; Kazuo Tanaka; Masashi Sugishita; Hideto Yamaguchi; Kenji Shirako

Archive | 1999

Semiconductor production apparatus and method of controling temperature of the same

Kazuo Tanaka; Kenzo Urabe; Hideto Yamaguchi; 健三 占部; 英人 山口; 和夫 田中

Archive | 1999

Temperature control simulation method and apparatus

Kazuo Tanaka; Hideto Yamaguchi; Kenzo Urabe

Archive | 1998

Process control method and electronic device manufacture using the same

Kazuo Tanaka; Kenzo Urabe; Hideto Yamaguchi; 健三 占部; 英人 山口; 和夫 田中

Archive | 2009

Temperature control method, method of obtaining a temperature correction value, method of manufacturing a semiconductor device and substrate treatment apparatus

Hideto Yamaguchi

Archive | 2007

Substrate Processing System and Operation Inspecting Method

Hideto Yamaguchi; Yasuhiro Joho; Mitsuhiro Matsuda; Yoshitaka Koyama

Archive | 2014

Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device

Tetsuya Kosugi; Masaaki Ueno; Hideto Yamaguchi

Explore More

Collaboration

Dive into the Hideto Yamaguchi's collaboration.

Top Co-Authors
Avatar

Kazuo Tanaka

University of Tokyo

View shared research outputs
Top Co-Authors
Avatar

Masaaki Ueno

Hitachi

View shared research outputs
Top Co-Authors
Avatar

和夫 田中

Imperial College London

View shared research outputs
Top Co-Authors
Avatar

Kenji Shirako

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Masashi Sugishita

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Shinobu Sugiura

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Kazuo Tanaka

University of Tokyo

View shared research outputs
Top Co-Authors
Avatar

Mitsuhiro Matsuda

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Tetsuya Kosugi

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Yasuhiro Joho

Hitachi

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge