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Shinobu Sugiura

Hitachi

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Publication

Featured researches published by Shinobu Sugiura.

Archive | 2011

SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROLLING METHOD OF SUBSTRATE PROCESSING APPARATUS, AND HEATING METHOD OF SUBSTRATE PROCESSING APPARATUS

Shinobu Sugiura; Masaaki Ueno; Kazuo Tanaka; Masashi Sugishita; Hideto Yamaguchi; Kenji Shirako

Archive | 2005

Heat insulation wall, heating element hold structure, heating device, and substrate processing equipment

Hitoshi Murata; Shinobu Sugiura; Hideto Tateno; 忍 杉浦; 等 村田; 秀人 立野

Archive | 2010

HEATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Hitoshi Murata; Tetsuya Kosugi; Shinobu Sugiura

Archive | 2005

Heating element holding structure, insulated structure, heating unit and substrate processing equipment

Tetsuya Kosugi; Hitoshi Murata; Shinobu Sugiura; 哲也 小杉; 忍 杉浦; 等 村田

Archive | 2009

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND CEILING INSULATING PART

Hitoshi Murata; Tetsuya Kosugi; Shinobu Sugiura

Archive | 2007

Heat-proof wall, heater keeper tectosome, heating arrangement and substrate processing unit

Shinobu Sugiura; Hidehito Tateno; Hitoshi Murata

Archive | 2011

Substrate processing apparatus capable of switching control mode of heater

Shinobu Sugiura; Masaaki Ueno; Kazuo Tanaka; Masashi Sugishita; Hideto Yamaguchi; Kenji Shirako

Archive | 2011

HEATER SUPPORTING DEVICE

Tetsuya Kosugi; Hitoshi Murata; Shinobu Sugiura; Masaaki Ueno

Archive | 2008

Substrate processor, semiconductor device manufacturing method, and ceiling heat insulator

Tetsuya Kosugi; Hitoshi Murata; Shinobu Sugiura; 哲也 小杉; 忍 杉浦; 等 村田

Archive | 2007

Retainer tectosome, insulation tectosome and heating arrangement of heater

Hitoshi Murata; Shinobu Sugiura; Tetsuya Kosugi

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Collaboration

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Hitoshi Murata

Hitachi

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Tetsuya Kosugi

Hitachi

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Masaaki Ueno

Hitachi

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Hideto Yamaguchi

Hitachi

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Kenji Shirako

Hitachi

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Masashi Sugishita

Hitachi

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Kazuo Tanaka

University of Tokyo

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Kazuo Tanaka

University of Tokyo

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和夫 田中

Imperial College London

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