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Tetsuya Kosugi

Hitachi

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Publication

Featured researches published by Tetsuya Kosugi.

Archive | 2010

HEATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Hitoshi Murata; Tetsuya Kosugi; Shinobu Sugiura

Archive | 2005

Heating element holding structure, insulated structure, heating unit and substrate processing equipment

Tetsuya Kosugi; Hitoshi Murata; Shinobu Sugiura; 哲也 小杉; 忍 杉浦; 等 村田

Archive | 2009

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND CEILING INSULATING PART

Hitoshi Murata; Tetsuya Kosugi; Shinobu Sugiura

Archive | 2011

Substrate processing apparatus and heating equipment

Hitoshi Murata; Tetsuya Kosugi

Archive | 2007

OPTICAL DISK IDENTIFICATION INFORMATION RECORDING DEVICE AND OPTICAL DISK IDENTIFICATION INFORMATION RECORDING METHOD

Tetsuya Kosugi; 哲也 小杉

Archive | 2014

Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device

Tetsuya Kosugi; Masaaki Ueno; Hideto Yamaguchi

Archive | 2014

INSULATION STRUCTURE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Tetsuya Kosugi; Motoya Takewaki; Hitoshi Murata; Masaaki Ueno

Archive | 2013

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND THERMOCOUPLE SUPPORT

Hideto Yamaguchi; Tetsuya Kosugi; Masaaki Ueno

Archive | 2011

HEATER SUPPORTING DEVICE

Tetsuya Kosugi; Hitoshi Murata; Shinobu Sugiura; Masaaki Ueno

Archive | 2008

Substrate processor, semiconductor device manufacturing method, and ceiling heat insulator

Tetsuya Kosugi; Hitoshi Murata; Shinobu Sugiura; 哲也 小杉; 忍 杉浦; 等 村田

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Collaboration

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Hitoshi Murata

Hitachi

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Masaaki Ueno

Hitachi

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Shinobu Sugiura

Hitachi

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Motoya Takewaki

Hitachi

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Hideto Yamaguchi

Hitachi

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Masashi Sugishita

Hitachi

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Atushi Umekawa

Hitachi

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Kenji Shinozaki

Hitachi

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Tokunobu Akao

Hitachi

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