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Kenji Shinma

Sumitomo Electric Industries

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Publication

Featured researches published by Kenji Shinma.

Archive | 2006

Wafer holder, heater unit used for wafer prober and having wafer holder, and wafer prober

Kenji Shinma; Katsuhiro Itakura; Tomoyuki Awazu; Hirohiko Nakata

Archive | 2005

Semiconductor heating apparatus

Akira Kuibira; Hirohiko Nakata; Kenji Shinma

Archive | 2002

Heater member for mounting heating object and substrate processing apparatus using the same

Masuhiro Natsuhara; Hirohiko Nakata; Akira Kuibira; Kenji Shinma

Archive | 2005

Susceptor Unit and Apparatus in Which the Susceptor Is Installed

Kenji Shinma; Hirohiko Nakata; Masuhiro Natsuhara

Archive | 2007

WAFER HOLDER FOR SEMICONDUCTOR MANUFACTURING DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE EQUIPPED WITH THE SAME

Masuhiro Natsuhara; Tomoyuki Awazu; Kenji Shinma; Hirohiko Nakata

Archive | 2006

Wafer holder and exposure apparatus equipped with wafer holder

Kenji Shinma; Hirohiko Nakata; Masuhiro Natsuhara

Archive | 2005

Supporting unit for semiconductor manufacturing device and semiconductor manufacturing device with supporting unit installed

Akira Kuibira; Hirohiko Nakata; Kenji Shinma

Archive | 2001

Sealed airtight container for optical-semiconductors and optical-semiconductors module

Nobuyoshi Tatoh; Kenji Shinma; Koji Nishi

Archive | 2007

WAFER HOLDER, MANUFACTURING METHOD THEREOF AND SEMICONDUCTOR MANUFACTURING APPARATUS

Masuhiro Natsuhara; Tomoyuki Awazu; Kenji Shinma; Hirohiko Nakata

Archive | 2005

Semiconductor-producing apparatus

Kenji Shinma; Hirohiko Nakata; Masuhiro Natsuhara

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Collaboration

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Hirohiko Nakata

Sumitomo Electric Industries

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Masuhiro Natsuhara

Sumitomo Electric Industries

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Akira Kuibira

Sumitomo Electric Industries

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Tomoyuki Awazu

Sumitomo Electric Industries

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Katsuhiro Itakura

Sumitomo Electric Industries

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Akira Mikumo

Sumitomo Electric Industries

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Keiji Kitabayashi

Sumitomo Electric Industries

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Koji Nishi

Sumitomo Electric Industries

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Nobuyoshi Tatoh

Sumitomo Electric Industries

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