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Dive into the research topics where Isao Yokokawa is active.

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ieee soi 3d subthreshold microelectronics technology unified conference | 2014

SOI substrate solutions for recent advanced device applications

Nobuhiko Noto; O. Ishikawa; Hiroji Aga; Toru Ishizuka; Isao Yokokawa; Masatake Nakano

SOI substrate technology for recent advanced device applications is reviewed from a standpoint of a dedicated wafer supplier. A structure of Si thin film on sapphire (SOS) has been used for device development and manufacturing from 1970s. Currently a SOI substrate of Si/SiO2/Si structure is widely used for industrial applications.


Archive | 1999

Method of fabricating an SOI wafer and SOI wafer fabricated by the method

Isao Yokokawa; Naoto Tate; Kiyoshi Mitani


Archive | 2004

Method for manufacturing SOI wafer and SOI wafer

Isao Yokokawa; Hiroji Aga; Kiyotaka Takano; Kiyoshi Mitani


Archive | 2005

Method for manufacturing bonded wafer and bonded wafer

Tokio Takei; Sigeyuki Yoshizawa; Susumu Miyazaki; Isao Yokokawa; Nobuhiko Noto


Archive | 2005

Semiconductor wafer manufacturing method

Isao Yokokawa; Nobuhiko Noto


Archive | 1999

Method of fabricating an SOI wafer

Kiyoshi Mitani; Isao Yokokawa


Archive | 2005

Bonded wafer and method of producing bonded wafer

Kiyoshi Mitani; Kiyoshi Demizu; Isao Yokokawa; Tadahiro Ohmi; Shigetoshi Sugawa


Archive | 2002

Production method for soi wafer

Kiyoshi Mitani; Isao Yokokawa


Archive | 2001

Method for producing bonded wafer and bonded wafer

Masatake Nakano; Isao Yokokawa; Kiyoshi Mitani


Archive | 2003

Method of producing soi wafer and soi wafer

Hiroji Aga; Isao Yokokawa; Kiyotaka Takano; Kiyoshi Mitani

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Kiyoshi Mitani

East Tennessee State University

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Nobuhiko Noto

East Tennessee State University

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Kiyoshi Demizu

East Tennessee State University

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Masahiro Kato

East Tennessee State University

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Masatake Nakano

East Tennessee State University

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Norihiro Kobayashi

East Tennessee State University

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Toru Ishizuka

East Tennessee State University

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Kiyotaka Takano

East Tennessee State University

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Shin-Ichi Yamaguchi

East Tennessee State University

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