Hiroki Ohno
Tokyo Electron
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Hiroki Ohno.
Solid State Phenomena | 2005
Hiromitsu Namba; Takehiko Orii; Hiroki Ohno; Glenn W. Gale
Introduction Watermarks have long been known to occur when hydrophobic silicon is exposed after HF wet processing, particularly where patterns include hydrophilic and hydrophobic regions [1-3]. Historically these defects have been associated with an inadequate drying process, and were a driving factor in the semiconductor industry’s transition from spin to IPA-based drying in FEOL batch systems. Silicon is oxidized by oxygen dissolved in DI water during rinsing, and this oxide is dissolved into the water. Upon thinning of a water layer or droplet on the wafer, dissolved silica and/or silicic acid precipitate on the wafer. Avoiding oxygen in the water and evaporation during drying have been identified as key factors in preventing watermark formation. We systematically studied mechanisms of formation of such defects after dilute HF processing in a single wafer wet cleaning chamber. As a result, different types of defects were identified that are distinct from previously reported watermarks. Subsequently the conditions under which these defects can be formed were found, so that they may be prevented.
Archive | 1997
Yoshihide Sato; Takayuki Komiya; Hiroki Ohno
Archive | 2005
Hiroki Ohno; Kenji Sekiguchi
Archive | 2005
Masaru Amai; Kenji Sekiguchi; Takehiko Orii; Hiroki Ohno; Satoru Tanaka; Takuya Mori
Archive | 2002
Nobuo Konishi; Mitsuaki Iwashita; Hiroki Ohno; Shigeru Kawamura; Masahito Sugiura
Archive | 2005
Kenji Sekiguchi; Hiroki Ohno
Archive | 2005
Masaru Amai; Kenji Sekiguchi; Takehiko Orii; Hiroki Ohno; Satoru Tanaka; Takuya Mori
Archive | 2004
Yoshichika Tokuno; Norihiro Ito; Takehiko Orii; Mitsunori Nakamori; Tadashi Iino; Hiroki Ohno; Yusuke Saito
Archive | 2014
Linan Ji; Hidekazu Hayashi; Hiroshi Tomita; Hisashi Okuchi; Yohei Sato; Takayuki Toshima; Mitsuaki Iwashita; Kazuyuki Mitsuoka; Gen You; Hiroki Ohno; Takehiko Orii
Archive | 2005
Kenji Sekiguchi; Hiroki Ohno