Kazuyuki Mitsuoka | Researchain

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Featured researches published by Kazuyuki Mitsuoka.

Archive | 1992

Method for treating organic material film

Kazuyuki Mitsuoka; Tadashi Onishi; Minoru Honda

Archive | 2003

Thin film processing method and system

Tadashi Onishi; Manabu Hama; Minoru Honda; Kazuyuki Mitsuoka; Mitsuaki Iwashita

Archive | 2014

Supercritical drying method for semiconductor substrate and supercritical drying apparatus

Linan Ji; Hidekazu Hayashi; Hiroshi Tomita; Hisashi Okuchi; Yohei Sato; Takayuki Toshima; Mitsuaki Iwashita; Kazuyuki Mitsuoka; Gen You; Hiroki Ohno; Takehiko Orii

Archive | 2011

Supercritical processing apparatus and supercritical processing method

Takayuki Toshima; Mitsuaki Iwashita; Kazuyuki Mitsuoka; Hidekazu Okamoto; Hideo Namatsu

Archive | 2004

Electron beam processing method and apparatus

Kazuyuki Mitsuoka; Minoru Honda; Song Yun Kang; Yusuke Saito

Archive | 2013

Method for processing substrate, device for processing substrate and storage medium

Hidekazu Hayashi; 秀和林; Yohei Sato; 洋平佐藤; Hisashi Oguchi; 寿史大口; Hiroshi Tomita; 寛冨田; Kazuyuki Mitsuoka; 一行光岡; Mitsuaki Iwashita; 光秋岩下; Takehiko Orii; 武彦折居; Hajime Yo

Archive | 2013

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, FLUID SUPPLYING METHOD AND STORAGE MEDIUM

Gentaro Goshi; Kazuyuki Mitsuoka; Gen You; Hiroki Ohno; Takehiko Orii; Takayuki Toshima

Archive | 2012

Supercritical drying method and apparatus for semiconductor substrates

Yohei Sato; Hisashi Okuchi; Hiroshi Tomita; Hidekazu Hayashi; Yukiko Kitajima; Takayuki Toshima; Mitsuaki Iwashita; Kazuyuki Mitsuoka; Gen You; Hiroki Ohno; Takehiko Orii

Archive | 2009