Ryooji Fukuyama | Researchain

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Featured researches published by Ryooji Fukuyama.

Archive | 1992

Method and apparatus for processing samples

Masayuki Kojima; Yoshimi Torii; Michimasa Hunabashi; Kazuyuki Suko; Takashi Yamada; Keizo Kuroiwa; Kazuo Nojiri; Yoshinao Kawasaki; Yoshiaki Sato; Ryooji Fukuyama; Hironobu Kawahara

Archive | 1996

Method of treating samples

Ryooji Fukuyama; Makoto Nawata; Yutaka Kakehi; Hironobu Kawahara; Yoshiaki Sato; Yoshimi Torii; Akira Kawaraya; Yoshie Sato

Archive | 1990

Method of removing residual corrosive compounds by plasma etching followed by washing

Yoshinao Kawasaki; Hironobu Kawahara; Yoshiaki Sato; Ryooji Fukuyama; Kazuo Nojiri; Yoshimi Torii

Archive | 1990

Plasma etching method and apparatus

Hironobu Kawahara; Yoshinao Kawasaki; Yoshiaki Sato; Ryooji Fukuyama

Archive | 1991

Microwave plasma generating method and apparatus

Seiichi Watanabe; Makoto Nawata; Ryooji Fukuyama; Yutaka Kakehi; Saburo Kanai; Yoshinao Kawasaki

Archive | 1991

Sample processing method and apparatus

Yoshinao Kawasaki; Hironobu Kawahara; Yoshiaki Sato; Ryooji Fukuyama; Kazuo Nojiri; Yoshimi Torii

Archive | 2004

Etching method of organic insulating film

Michinobu Mizumura; Ryooji Fukuyama; Yutaka Ohmoto; Katsuya Watanabe

Archive | 1990

A method of treating a sample of aluminium-containing material

Ryooji Fukuyama; Yutaka Kakehi; Makoto Nawata; Hironobu Kawahara; Yoshiaki Sato; Yoshimi Torii; Akira Kawaraya; Yoshie Sato

Archive | 2001

Apparatus for processing samples

Masayuki Kojima; Yoshimi Torii; Michimasa Hunabashi; Kazuyuki Suko; Takashi Yamada; Keizo Kuroiwa; Kazuo Nojiri; Yoshinao Kawasaki; Yoshiaki Sato; Ryooji Fukuyama; Hironobu Kawahara

Archive | 2004