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Dive into the research topics where Yoshinao Kawasaki is active.

Publication


Featured researches published by Yoshinao Kawasaki.


Archive | 1988

Plasma treating method and apparatus therefor

Yoshinao Kawasaki; Hironobu Kawahara; Yutaka Kakehi; Kado Hirobe; Katsuyoshi Kudo


Archive | 2001

Vacuum processing apparatus and semiconductor manufacturing line using the same

Minoru Soraoka; Ken Yoshioka; Yoshinao Kawasaki


Archive | 1999

Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same

Jun Sugiura; Osamu Tsuchiya; Makoto Ogasawara; Fumio Ootsuka; Kazuyoshi Torii; Isamu Asano; Nobuo Owada; Mitsuaki Horiuchi; Tsuyoshi Tamaru; Hideo Aoki; Nobuhiro Otsuka; Seiichirou Shirai; Masakazu Sagawa; Yoshihiro Ikeda; Masatoshi Tsuneoka; Toru Kaga; Tomotsugu Shimmyo; Hidetsugu Ogishi; Osamu Kasahara; Hiromichi Enami; Atsushi Wakahara; Hiroyuki Akimori; Sinichi Suzuki; Keisuke Funatsu; Yoshinao Kawasaki; Tunehiko Tubone; Takayoshi Kogano; Ken Tsugane


Archive | 2009

Microwave plasma processing device

Tetsunori Kaji; Takashi Fujii; Motohiko Yoshigai; Yoshinao Kawasaki; Masaharu Nishiumi


Archive | 1992

Method and apparatus for processing samples

Masayuki Kojima; Yoshimi Torii; Michimasa Hunabashi; Kazuyuki Suko; Takashi Yamada; Keizo Kuroiwa; Kazuo Nojiri; Yoshinao Kawasaki; Yoshiaki Sato; Ryooji Fukuyama; Hironobu Kawahara


Archive | 1990

Method of removing residual corrosive compounds by plasma etching followed by washing

Yoshinao Kawasaki; Hironobu Kawahara; Yoshiaki Sato; Ryooji Fukuyama; Kazuo Nojiri; Yoshimi Torii


Archive | 1990

Plasma etching method and apparatus

Hironobu Kawahara; Yoshinao Kawasaki; Yoshiaki Sato; Ryooji Fukuyama


Archive | 1991

Microwave plasma processing method and apparatus

Saburo Kanai; Yoshinao Kawasaki; Kazuaki Ichihashi; Seiichi Watanabe; Makoto Nawata


Archive | 1994

Plasma process apparatus including ground electrode with protection film

Tetsunori Kaji; Takashi Fujii; Motohiko Yoshigai; Yoshinao Kawasaki; Masaharu Nishiumi


Archive | 1991

Microwave plasma generating method and apparatus

Seiichi Watanabe; Makoto Nawata; Ryooji Fukuyama; Yutaka Kakehi; Saburo Kanai; Yoshinao Kawasaki

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