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Hiroyuki Shichida

Hitachi

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Publication

Featured researches published by Hiroyuki Shichida.

Archive | 2002

Method of holding substrate and substrate holding system

Naoyuki Tamura; Kazue Takahashi; Youichi Ito; Yoshifumi Ogawa; Hiroyuki Shichida; Tsunehiko Tsubone

Archive | 2005

Electrode cover for a plasma processing apparatus

Takeo Uchino; Hiroyuki Shichida; Masakazu Isozaki; Tsunehiko Tsubone; Akitaka Makino

Archive | 1993

Method of and apparatus for securing and cooling/heating a wafer

Hiroyuki Shichida; Naoyuki Tamura; Akitaka Makino

Archive | 1996

Substrate holding system including an electrostatic chuck

Naoyuki Tamura; Kazue Takahashi; Youichi Ito; Yoshifumi Ogawa; Hiroyuki Shichida; Tsunehiko Tsubone

Archive | 1994

Plasma generating method and apparatus and plasma processing method and apparatus

Katsuya Watanabe; Tetsunori Kaji; Naoyuki Tamura; Kenji Nakata; Hiroyuki Shichida; Seiichi Watanabe; Sadayuki Okudaira; Keizo Suzuki

Archive | 1994

WAFER HOLDING DEVICE AND HOLDING METHOD

Yoichi Ito; Yoshifumi Ogawa; Hiroyuki Shichida; Nushito Takahashi; Naoyuki Tamura; Tsunehiko Tsubone; 弘之 七田; 陽一 伊藤; 恒彦 坪根; 芳文 小川; 直行 田村; 主人 高橋

Archive | 1994

Treating method and treating apparatus for treated object under reduced pressure environment

Youichi Ito; Manabu Edamura; Naoyuki Tamura; Hiroyuki Shichida

Archive | 1993

Method and device for processing article to be processed in reduced pressure atmosphere

Manabu Edamura; Yoichi Ito; Hiroyuki Shichida; Naoyuki Tamura; 弘之 七田; 陽一 伊藤; 学 枝村; 直行 田村

Archive | 1992

Single wafer vacuum processing device

Akitaka Makino; Kenji Nakada; Yoshifumi Ogawa; Hiroyuki Shichida; Naoyuki Tamura; 弘之 七田; 健二 中田; 芳文 小川; 昭孝 牧野; 直行 田村

Archive | 1994

Halteverfahren und Haltesystem für ein Substrat

Naoyuki Tamura; Kazue Takahashi; Youichi Ito; Yoshifumi Ogawa; Hiroyuki Shichida; Tsunehiko Tsubone

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Naoyuki Tamura

Hitachi

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Yoshifumi Ogawa

Hitachi

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Youichi Ito

Hitachi

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Akitaka Makino

Hitachi

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Tsunehiko Tsubone

Hitachi

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Manabu Edamura

Hitachi

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Kazue Takahashi

Hitachi

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Keizo Suzuki

Hitachi

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Kenji Nakata

Hitachi

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Seiichi Watanabe

Hitachi

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