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Dive into the research topics where Yoshifumi Ogawa is active.

Publication


Featured researches published by Yoshifumi Ogawa.


Archive | 2002

Method of holding substrate and substrate holding system

Naoyuki Tamura; Kazue Takahashi; Youichi Ito; Yoshifumi Ogawa; Hiroyuki Shichida; Tsunehiko Tsubone


Archive | 1980

Microwave plasma etching apparatus

Ken Ninomiya; Shigeru Nishimatsu; Keizo Suzuki; Sadayuki Okudaira; Yoshifumi Ogawa


Archive | 1996

Substrate holding system including an electrostatic chuck

Naoyuki Tamura; Kazue Takahashi; Youichi Ito; Yoshifumi Ogawa; Hiroyuki Shichida; Tsunehiko Tsubone


Archive | 1985

Method and apparatus for monitoring etching

Yoshifumi Ogawa; Masaharu Nishiumi; Yoshie Tanaka; Sadayuki Okudaira; Shigeru Nishimatsu


Archive | 1995

Plasma generator with mode restricting means

Yutaka Kakehi; Yoshinao Kawasaki; Keizo Suzuki; Kazuo Nojiri; Hiromichi Enami; Tetsunori Kaji; Seiichi Watanabe; Yoshifumi Ogawa


Archive | 1994

WAFER HOLDING DEVICE AND HOLDING METHOD

Yoichi Ito; Yoshifumi Ogawa; Hiroyuki Shichida; Nushito Takahashi; Naoyuki Tamura; Tsunehiko Tsubone; 弘之 七田; 陽一 伊藤; 恒彦 坪根; 芳文 小川; 直行 田村; 主人 高橋


Archive | 2012

PLASMA PROCESSING APPARATUS AND DIAGNOSIS METHOD THEREOF

Masahiro Nagatani; Yoshifumi Ogawa


Archive | 1993

Methods and apparatus for generating plasma, and semiconductor processing methods using mode restricted microwaves

Yutaka Kakehi; Yoshinao Kawasaki; Keizo Suzuki; Kazuo Nojiri; Hiromichi Enami; Tetsunori Kaji; Seiichi Watanabe; Yoshifumi Ogawa


Archive | 2012

VACUUM PROCESSING APPARATUS AND OPERATING METHOD OF THE SAME

Takahiro Shimomura; Yoshifumi Ogawa; Susumu Tauchi


Archive | 1992

Single wafer vacuum processing device

Akitaka Makino; Kenji Nakada; Yoshifumi Ogawa; Hiroyuki Shichida; Naoyuki Tamura; 弘之 七田; 健二 中田; 芳文 小川; 昭孝 牧野; 直行 田村

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