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Hisashi Maejima

Hitachi

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Publication

Featured researches published by Hisashi Maejima.

Archive | 1994

Semiconductor integrated circuit device fabrication method and its fabrication apparatus

Nobuyuki Iriki; Tsutomu Okabe; Kenji Watanabe; Hisashi Maejima; Shinji Kuniyoshi

Archive | 1986

Wafer and method of working the same

Hisashi Maejima; Hiroshi Nishizuka; Susumu Komoriya; Etuo Egashira

Archive | 1996

Process for fabrication of semiconductor device, semiconductor wafer for use in the process and process for the preparation of the wafer

Tomomi Sato; Norio Suzuki; Hirofumi Shimizu; Atsuyoshi Koike; Hisashi Maejima; Akira Kanai

Archive | 1992

Method of producing a wafer having a curved notch

Hisashi Maejima; Hiroshi Nishizuka; Susumu Komoriya; Etuo Egashira

Archive | 1978

Method of and apparatus for aligning photomask

Susumu Komoriya; Koyo Morita; Hiroshi Nishizuka; Hisashi Maejima

Archive | 1991

Wafer having chamfered bend portions in the joint regions between the contour of the wafer and the cut-away portion of the wafer

Hisashi Maejima; Hiroshi Nishizuka; Susumu Komoriya; Etuo Egashira

Archive | 1982

Pattern exposing apparatus

Akihiro Takanashi; Norikazu Hashimoto; Hisashi Maejima; Shuji Sugiyama

Archive | 1996

Alignment mark and exposure process using the same

Susumu Komoriya; Takahiro Machida; Shinji Kuniyoshi; Nobuyuki Iriki; Hisashi Maejima; Masamichi Kobayashi

Archive | 1983

WAFER E RELATIVO PROCEDIMENTO DI LAVORAZIONE

Hisashi Maejima; Hiroshi Nishizuka; Susumu Komoriya; Etuo Egashira

Archive | 1983

Scheibenförmiger Wafer und Verfahren zu seiner Herstellung

Hisashi Maejima; Hiroshi Nishizuka; Susumu Komoriya; Etuo Egashira

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Collaboration

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Susumu Komoriya

Hitachi

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Hiroshi Nishizuka

Hitachi

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Etuo Egashira

Hitachi

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Nobuyuki Iriki

Hitachi

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Shinji Kuniyoshi

Hitachi

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Akihiro Takanashi

Hitachi

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Akira Kanai

Hitachi

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Atsuyoshi Koike

Hitachi

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Hirofumi Shimizu

Hitachi

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Kenji Watanabe

Hitachi

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