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Hung-Chun Wang

TSMC

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Publication

Featured researches published by Hung-Chun Wang.

Archive | 2014

Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof

Ching-Hsu Chang; Hung-Chun Wang; Boren Luo; Wen-Chun Huang; Ru-Gun Liu

Archive | 2012

Pattern Correction With Location Effect

Hung-Chun Wang; Ming-Hui Chih; Cheng Kun Tsai; Wen-Chun Huang; Ru-Gun Liu

Archive | 2011

GEOMETRIC PATTERN DATA QUALITY VERIFICATION FOR MASKLESS LITHOGRAPHY

Hung-Chun Wang; Pei-Shiang Chen; Tzu-Chin Lin; Cheng-Hung Chen; Shih-Chi Wang; Nian-Fuh Cheng; Jeng-Horng Chen; Wen-Chun Huang; Ru-Gun Liu

Archive | 2012

Method for high volume e-beam lithography

Hung-Chun Wang; Tzu-Chin Lin; Chia-Chi Lin; Nian-Fuh Cheng; Jeng-Horng Chen; Wen-Chun Huang; Ru-Gun Liu

Archive | 2014

Electron Beam Data Storage System and Method for High Volume Manufacturing

Hung-Chun Wang; Pei-Shiang Chen; Tzu-Chin Lin; Faruk Krecinic; Jeng-Horng Chen; Wen-Chun Huang; Ru-Gun Liu

Archive | 2014

Method and system for E-beam lithography with multi-exposure

Pei-Shiang Chen; Hung-Chun Wang; Jeng-Horng Chen

Archive | 2011

Striping methodology for maskless lithography

Hung-Chun Wang; Tzu-Chin Lin; Nian-Fuh Cheng; Jeng-Horng Chen; Wen-Chun Huang; Ru-Gun Liu

Archive | 2013

SMART SUBFIELD METHOD FOR E-BEAM LITHOGRAPHY

Pei-Shiang Chen; Hung-Chun Wang; Jeng-Horng Chen; Cheng-Hung Chen; Shih-Chi Wang; Nian-Fuh Cheng; Chia-Chi Lin

Archive | 2013

Methodology of optical proximity correction optimization

Hung-Chun Wang; Ming-Hui Chih; Chia-Ping Chiang; Feng-Ju Chang; Cheng Kun Tsai; Wen-Chun Huang; Ru-Gun Liu

Archive | 2013

Providing electron beam proximity effect correction by simulating write operations of polygonal shapes

Hung-Chun Wang; Jeng-Horng Chen; Shy-Jay Lin; Chia-Ping Chiang; Cheng Kun Tsai; Wen-Chun Huang; Ru-Gun Liu

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Collaboration

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Ru-Gun Liu

TSMC

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Wen-Chun Huang

TSMC

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Jeng-Horng Chen

TSMC

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Cheng Kun Tsai

TSMC

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Tzu-Chin Lin

TSMC

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Feng-Ju Chang

TSMC

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Ming-Hui Chih

TSMC

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Nian-Fuh Cheng

TSMC

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Pei-Shiang Chen

TSMC

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Chia-Chi Lin

TSMC

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