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Ichiro Katakabe

Ebara Corporation

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Publication

Featured researches published by Ichiro Katakabe.

Archive | 2003

Method of and apparatus for cleaning substrate

Ichiro Katakabe; Shinya Morisawa; Haruko Ohno; Sachiko Kihara; Akira Fukunaga

Archive | 2001

Revolution member supporting apparatus and semiconductor substrate processing apparatus

Akihisa Hongo; Ichiro Katakabe; Shinya Morisawa

Archive | 2004

Substrate processing apparatus, substrate processing method, and substrate holding apparatus

Kaoru Yamada; Takayuki Saito; Sumio Yabe; Kenya Ito; Masayuki Kamezawa; Masaya Seki; Ichiro Katakabe; Yuki Inoue

Archive | 2003

Electroless plating apparatus and post-electroless plating cleaning method

Ichiro Katakabe; Yuki Inoue; Xinming Wang; Daisuke Takagi

Archive | 2004

Apparatus for cleaning a substrate having metal interconnects

Masako Kodera; Kenya Ito; Masayuki Kamezawa; Satomi Hamada; Ichiro Katakabe

Archive | 2001

ROTATION HOLDING DEVICE AND SEMICONDUCTOR SUBSTRATE PROCESSING DEVICE

Akihisa Hongo; Ichiro Katakabe; Shinya Morisawa

Archive | 2001

Method and apparatus for etching ruthenium films

Akira Fukunaga; Haruko Ohno; Ichiro Katakabe; Sachiko Kihara

Archive | 2003

Cleaning device of metal wiring forming substrate

Toshimi Hamada; Kenya Ito; Masayuki Kamezawa; Ichiro Katakabe; Masako Kodera; 正之 亀澤; 賢也 伊藤; 雅子 小寺; 聡美 濱田; 一郎 片伯部

Archive | 2000

Etching method and its apparatus

Akira Fukunaga; Ichiro Katakabe; Sachiko Kihara; Haruko Ono; 晴子 大野; 幸子 木原; 一郎 片伯部; 明 福永

Archive | 1998

Electrolytic ionized water producing device, method for producing electrolytic ionized water, cleaner and method for cleaning semiconductor device

Ichiro Katakabe; Hiroshi Kawamoto; Naoto Miyashita; 直人 宮下; 浩 川本; 一郎 片伯部

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Collaboration

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Naoto Miyashita

Toshiba

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Sachiko Kihara

Ebara Corporation

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Shinya Morisawa

Ebara Corporation

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Akira Fukunaga

Ebara Corporation

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Haruko Ohno

Ebara Corporation

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Akihisa Hongo

Ebara Corporation

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Masako Kodera

Toshiba

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Masayuki Kamezawa

Ebara Corporation

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Kaoru Yamada

Ebara Corporation

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Kenya Ito

Ebara Corporation

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