Shinya Morisawa | Researchain

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Featured researches published by Shinya Morisawa.

Archive | 2003

Wafer cleaning apparatus

Akihisa Hongo; Shinya Morisawa

Archive | 2003

Method of and apparatus for cleaning substrate

Ichiro Katakabe; Shinya Morisawa; Haruko Ohno; Sachiko Kihara; Akira Fukunaga

Archive | 2001

Revolution member supporting apparatus and semiconductor substrate processing apparatus

Akihisa Hongo; Ichiro Katakabe; Shinya Morisawa

Archive | 2009

Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method

Mitsuru Miyazaki; Seiji Katsuoka; Naoki Matsuda; Junji Kunisawa; Kenichi Kobayashi; Hiroshi Sotozaki; Hiroyuki Shinozaki; Osamu Nabeya; Shinya Morisawa; Takahiro Ogawa; Natsuki Makino

Archive | 2001

ROTATION HOLDING DEVICE AND SEMICONDUCTOR SUBSTRATE PROCESSING DEVICE

Akihisa Hongo; Ichiro Katakabe; Shinya Morisawa

Archive | 2004

Plating apparatus, plating method and substrate processing apparatus

Tsutomu Nakada; Junji Kunisawa; Hiroyuki Kanda; Mizuki Nagai; Satoru Yamamoto; Koji Mishima; Shinya Morisawa; Seiji Katsuoka; Natsuki Makino; Yukio Fukunaga

Archive | 2002