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James P. Buonodono

Varian Semiconductor

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Publication

Featured researches published by James P. Buonodono.

Archive | 2010

Apparatus and method for controllably implanting workpieces

Anthony Renau; Ludovic Godet; Timothy J. Miller; Joseph C. Olson; Vikram Singh; James P. Buonodono; Deepak Ramappa; Russell J. Low; Atul Gupta; Kevin M. Daniels

Archive | 2006

Implanting with improved uniformity and angle control on tilted wafers

James P. Buonodono; Paul J. Murphy; Joseph C. Olson; Anthony Renau

Archive | 2013

WORKPIECE SUPPORT STRUCTURE WITH FOUR DEGREE OF FREEDOM AIR BEARING FOR HIGH VACUUM SYSTEMS

James P. Buonodono; Michael Esposito

Archive | 2015

DYNAMIC ELECTRODE PLASMA SYSTEM

James P. Buonodono

Archive | 2012

HIGH-THROUGHPUT ION IMPLANTER

William T. Weaver; Charles T. Carlson; Joseph C. Olson; James P. Buonodono; Paul Sullivan

Archive | 2006

Bushing unit with integrated conductor in ion accelerating device and related method

James P. Buonodono; Edward W. Bell; Piotr R. Lubicki

Archive | 2018

Apparatus and method for minimizing thermal distortion in electrodes used with ion sources

James P. Buonodono

Archive | 2016

SYSTEM AND METHOD FOR MOVING WORKPIECES BETWEEN MULTIPLE VACUUM ENVIRONMENTS

James P. Buonodono

Archive | 2014

LINKAGE CONDUIT FOR VACUUM CHAMBER APPLICATIONS

Eric Hermanson; Robert J. Mitchell; Steven M. Anella; Jeffrey Charles Blahnik; William T. Weaver; Michael Rohrer; James P. Buonodono

Archive | 2014

PROCESSING APPARATUS AND METHOD OF TREATING A SUBSTRATE

Ernest E. Allen; Jon Ballou; Kevin M. Daniels; James P. Buonodono; Joseph P. Dzengeleski

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Joseph C. Olson

Varian Semiconductor

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Anthony Renau

Varian Semiconductor

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Eric Hermanson

Varian Semiconductor

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Joseph P. Dzengeleski

Varian Semiconductor

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Kevin M. Daniels

Varian Semiconductor

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Robert J. Mitchell

Varian Semiconductor

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William T. Weaver

Varian Semiconductor

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Atul Gupta

Varian Semiconductor

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Charles T. Carlson

Varian Semiconductor

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Deepak Ramappa

Varian Semiconductor

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