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Joseph P. Dzengeleski

Varian Semiconductor

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Publication

Featured researches published by Joseph P. Dzengeleski.

Archive | 2010

System and method for controlling plasma deposition uniformity

Joseph P. Dzengeleski; George M. Gammel; Timothy J. Miller

Archive | 2004

Ion beam implant current, spot width and position tuning

Shengwu Chang; Antonella Cucchetti; Joseph P. Dzengeleski; Gregory R. Gibilaro; Rosario Mollica; Gregg A. Norris; Joseph C. Olson; Marie Welsch

Archive | 2008

Scan pattern for an ion implanter

Joseph P. Dzengeleski

Archive | 2008

Plasma ion process uniformity monitor

Joseph P. Dzengeleski; George M. Gammel; Bernard G. Lindsay; Vikram Singh

Archive | 2007

Magnetic monitoring of a faraday cup for an ion implanter

Joseph P. Dzengeleski; Morgan D. Evans; Jay T. Scheuer; Ashwin Shetty; Kenneth Swenson

Archive | 2010

METHOD AND APPARATUS FOR PLASMA DOSE MEASUREMENT

Joseph P. Dzengeleski; Timothy J. Miler; Jay T. Scheuer; Christopher J. Leavitt

Archive | 2007

Techniques for ion beam current measurement using a scanning beam current transformer

Joseph P. Dzengeleski; Costel Biloiu

Archive | 2007

Automated faraday sensor test system

Joseph P. Dzengeleski; Greg Gibilaro; Gregg A. Norris; David Olden; Tamer Onat

Archive | 2005

Method and system for in-situ calibration of a dose controller for ion implantation

Tamer Onat; Rajen Sud; Gregory R. Gibilaro; Joseph P. Dzengeleski

Archive | 2005

Faraday system integrity determination

Vinay Aggarwal; Joseph P. Dzengeleski

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Collaboration

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George M. Gammel

Varian Semiconductor

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Gregg A. Norris

Varian Semiconductor

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Gregory R. Gibilaro

Varian Semiconductor

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James P. Buonodono

Varian Semiconductor

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Jay T. Scheuer

Varian Semiconductor

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Tamer Onat

Varian Semiconductor

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Antonella Cucchetti

Varian Semiconductor

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Ashwin Shetty

Varian Semiconductor

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Bernard G. Lindsay

Varian Semiconductor

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Christopher J. Leavitt

Varian Semiconductor

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