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Jaroslaw W. Winniczek

Lam Research

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Publication

Featured researches published by Jaroslaw W. Winniczek.

Archive | 2008

SILICON ETCH WITH PASSIVATION USING PLASMA ENHANCED OXIDATION

Jaroslaw W. Winniczek; Robert P. Chebi

Archive | 2012

High strip rate downstream chamber

Ing-Yann Wang; Jaroslaw W. Winniczek; David Cooperberg; Erik A. Edelberg; Robert P. Chebi

Archive | 1999

Methods for reducing mask erosion during plasma etching

Jaroslaw W. Winniczek; Vahid Vahedi

Archive | 2008

FABRICATION OF A SILICON STRUCTURE AND DEEP SILICON ETCH WITH PROFILE CONTROL

Robert P. Chebi; Frank Y. Lin; Jaroslaw W. Winniczek; Wan-Lin Chen; Erin Mcdonnell; Lily Zheng; Stephan Lassig; Jeff Bogart; Camelia Rusu

Archive | 2008

Silicon etch with passivation using chemical vapor deposition

Jaroslaw W. Winniczek; Robert P. Chebi

Archive | 2011

Method and apparatus for removing photoresist

Robert P. Chebi; Jaroslaw W. Winniczek

Archive | 2012

Method for achieving smooth side walls after bosch etch process

Jaroslaw W. Winniczek; Frank Y. Lin; Alan J. Miller; Qing Xu; Seongjun Heo; Jin Hwan Ham; Sang Joon Yoon; Camelia Rusu

Archive | 2011

Method for providing high etch rate

Qing Xu; Camelia Rusu; Jaroslaw W. Winniczek; Frank Y. Lin; Alan J. Miller

Archive | 2006

Photoresist stripping chamber and methods of etching photoresist on substrates

Robert P. Chebi; Jaroslaw W. Winniczek; Alan J. Miller; Gladys So-Wan Lo

Archive | 2005

System, method and apparatus for in-situ substrate inspection

Aleksander Owczarz; Jaroslaw W. Winniczek; Luai Nasser; Alan M. Schoepp; Fred C. Redeker; Erik A. Edelberg

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Robert P. Chebi

Lam Research

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Alan J. Miller

Lam Research

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Camelia Rusu

Lam Research

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Frank Y. Lin

Lam Research

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Erin Mcdonnell

Lam Research

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Qing Xu

Lam Research

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Stephan Lassig

Lam Research

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Erik A. Edelberg

Lam Research

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Gladys So-Wan Lo

Lam Research

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Jeff Bogart

Lam Research

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