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Robert P. Chebi

Lam Research

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Publication

Featured researches published by Robert P. Chebi.

Archive | 1996

Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layer

Prashant Gadgil; Janet M. Flanner; John P. Jordon; Adrian Doe; Robert P. Chebi

Archive | 2008

SILICON ETCH WITH PASSIVATION USING PLASMA ENHANCED OXIDATION

Jaroslaw W. Winniczek; Robert P. Chebi

Archive | 2006

High chamber temperature process and chamber design for photo-resist stripping and post-metal etch passivation

Ing-Yann Albert Wang; Robert P. Chebi

Archive | 2002

Methods for reducing contamination of semiconductor substrates

Robert P. Chebi; David Hemker

Archive | 2012

High strip rate downstream chamber

Ing-Yann Wang; Jaroslaw W. Winniczek; David Cooperberg; Erik A. Edelberg; Robert P. Chebi

Archive | 2006

Methods of etching photoresist on substrates

Erik A. Edelberg; Robert P. Chebi; Gladys So-Wan Lo

Archive | 2008

FABRICATION OF A SILICON STRUCTURE AND DEEP SILICON ETCH WITH PROFILE CONTROL

Robert P. Chebi; Frank Y. Lin; Jaroslaw W. Winniczek; Wan-Lin Chen; Erin Mcdonnell; Lily Zheng; Stephan Lassig; Jeff Bogart; Camelia Rusu

Archive | 2005

Solutions for cleaning silicon semiconductors or silicon oxides

Oana M. Leonte; Robert P. Chebi

Archive | 2008

Silicon etch with passivation using chemical vapor deposition

Jaroslaw W. Winniczek; Robert P. Chebi

Archive | 2011

Method and apparatus for removing photoresist

Robert P. Chebi; Jaroslaw W. Winniczek

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Jaroslaw W. Winniczek

Lam Research

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Erik A. Edelberg

Lam Research

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Erin Mcdonnell

Lam Research

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Gladys So-Wan Lo

Lam Research

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Stephan Lassig

Lam Research

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Alan J. Miller

Lam Research

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Camelia Rusu

Lam Research

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Frank Y. Lin

Lam Research

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Gladys Sowan Low

Lam Research

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Ing-Yann Albert Wang

Lam Research

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