Jay D. Pinson | Researchain

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Featured researches published by Jay D. Pinson.

Archive | 2008

Cluster tool architecture for processing a substrate

Tetsuya Ishikawa; Rick J. Roberts; Helen R. Armer; Leon Volfovski; Jay D. Pinson; Michael R. Rice; David H. Quach; Mohsen Salek; Robert B. Lowrance; John A. Backer; William T. Weaver; Charles Carlson; Chongyang Wang; Jeffrey C. Hudgens; Harald Herchen; Brian Lue

Archive | 1999

PROCESSES USED IN AN INDUCTIVELY COUPLED PLASMA REACTOR

Kenneth S. Collins; Craig A. Roderick; John Trow; Chan-Lon Yang; Jerry Yuen-Kui Wong; Jeffrey Marks; Peter R. Keswick; David W. Groechel; Jay D. Pinson; Tetsuya Ishikawa; Lawrence Chang-Lai Lei; Masato Toshima

Archive | 1999

Substrate polishing with reduced contamination

Jay D. Pinson; Nitin Shah; David W. Groechel; Joe Waidl

Archive | 1999

Buffer station on CMP system

Jay D. Pinson; Arulkumar Shanmugasundram; Arnold Aronson; Rodney Lum

Archive | 2006

Cartesian cluster tool configuration for lithography type processes

Eric A. Englhardt; Michael R. Rice; Jeffrey C. Hudgens; Steve S. Hongkham; Jay D. Pinson; Mohsen Salek; Charles Carlson; William T. Weaver; Helen R. Armer

Archive | 2015

Batch curing chamber with gas distribution and individual pumping

Adib Khan; Shankar Venkataraman; Jay D. Pinson; Jang-Gyoo Yang; Nitin K. Ingle; Qiwei Liang

Archive | 2015

CONDITIONING REMOTE PLASMA SOURCE FOR ENHANCED PERFORMANCE HAVING REPEATABLE ETCH AND DEPOSITION RATES

Abdul Aziz Khaja; Mohamad A. Ayoub; Jay D. Pinson; Juan Carlos Rocha-Alvarez

Archive | 2012

TEMPERATURE CHANGE SYSTEM

Leon Volfovski; Harald Herchen; Jay D. Pinson

Archive | 2011

METHOD AND SYSTEM FOR THERMAL TREATMENT OF SUBSTRATES

Leon Volfovski; Harald Herchen; Jay D. Pinson

Archive | 2015

Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system

Zheng John Ye; Jay D. Pinson; Hiroji Hanawa; Jianhua Zhou; Xing Lin; Ren-Guan Duan; Kwangduk Douglas Lee; Bok Hoen Kim; Swayambhu P. Behera; Sungwon Ha; Ganesh Balasubramanian; Juan Carlos Rocha-Alvarez; Prashant Kumar Kulshreshtha; Jason K. Foster; Mukund Srinivasan; Uwe P. Haller; Hari Ponnekanti

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