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Leon Volfovski

Applied Materials

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Publication

Featured researches published by Leon Volfovski.

Archive | 2008

Cluster tool architecture for processing a substrate

Tetsuya Ishikawa; Rick J. Roberts; Helen R. Armer; Leon Volfovski; Jay D. Pinson; Michael R. Rice; David H. Quach; Mohsen Salek; Robert B. Lowrance; John A. Backer; William T. Weaver; Charles Carlson; Chongyang Wang; Jeffrey C. Hudgens; Harald Herchen; Brian Lue

Archive | 2006

Cluster tool substrate throughput optimization

Leon Volfovski; Tetsuya Ishikawa

Archive | 1998

Apparatus and methods for handling a substrate

Boris Govzman; Konstantin Volodarsky; Leon Volfovski

Archive | 2008

Wafer edge cleaning

Joseph Yudovsky; Anne-Douce Coulin; Leon Volfovski

Archive | 2005

Methods and apparatus for installing a scrubber brush on a mandrel

Joseph Yudovsky; Tai T. Ngo; Leon Volfovski; Anne-Douce Coulin

Archive | 2003

Substrate scrubbing apparatus having stationary brush member in contact with edge bevel of rotating substrate

Robert D. Tolles; David P. Alvarez; Jeffrey G. Knirck; Leon Volfovski

Archive | 2000

Grippers with ability to change wafer orientation

Boris Govzman; Leon Volfovski

Archive | 2011

SUBSTRATE SUPPORT WITH TEMPERATURE CONTROL

Leon Volfovski; Mayur G. Kulkarni

Archive | 2013

Substrate support with feedthrough structure

Leon Volfovski; Mayur G. Kulkarni

Archive | 2013

SUBSTRATE SUPPORT WITH SWITCHABLE MULTIZONE HEATER

Leon Volfovski; Mayur G. Kulkarni; Alex Minkovich; Michael R. Rice

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Collaboration

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Michael R. Rice

Applied Materials

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Mayur G. Kulkarni

Applied Materials

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Boris Govzman

Applied Materials

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Alex Minkovich

Applied Materials

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Anne-Douce Coulin

Applied Materials

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Harald Herchen

Applied Materials

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Jay D. Pinson

Applied Materials

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Konstantin Volodarsky

Applied Materials

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Matthew James Busche

Applied Materials

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Todd Egan

Applied Materials

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