Jean-Marc Hueber
Cymer, Inc.
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Publication
Featured researches published by Jean-Marc Hueber.
Proceedings of SPIE, the International Society for Optical Engineering | 1999
Thomas Hofmann; Jean-Marc Hueber; Palash P. Das; Scott Scholler
A molecular fluorine laser, specifically tailored for photolithography needs, was developed. Single line operation at 157.6nm was achieved by means of a prism assembly. Laser operation at repetition rates up to 1 kHz without signs of power saturation results in an average power of 15W. The energy stability was equal to comparable ArF laser. Proper choice of materials and corona pre-ionization enabled gas lifetimes in line with current ArF laser technology, without any need for cryogenic purification.
Proceedings of SPIE, the International Society for Optical Engineering | 2000
Jean-Marc Hueber; Herve A. Besaucele; Palash P. Das; Rick Eis; Alexander I. Ershov; Vladimir B. Fleurov; Dmitri V. Gaidarenko; Thomas Hofmann; Paul C. Melcher; William N. Partlo; Bernard K. Nikolaus; Scot T. Smith; Kyle R. Webb
We report the performance of a very high repetition rate ArF laser optimized for next generation, high NA, high throughput scanner. The lasers repetition rate exceeds 4kHz, at 5mJ, and at bandwidths of less than 1.2 pm. We discuss the complexity of high power operation, and make some estimates about the robustness of this technology. In particular, we discuss the risks of scaling to this high repetition rate, and prospects of exceeding 4kHz to near 6kHz with 95 percent bandwidths of less than 1pm.
Archive | 2001
Richard C. Ujazdowski; Michael C. Cates; Richard G. Morton; Jean-Marc Hueber; Ross H. Winnick
Archive | 2001
William N. Partlo; Igor V. Fomenkov; Jean-Marc Hueber; Zsolt Bor; Eckehard D. Onkels; Michael C. Cates; Richard C. Ujazdowski; Vladimir B. Fleurov; Dmitri V. Gaidarenko
Archive | 2001
Vladimir B. Fleurov; Michael C. Cates; Michael Du'lyea; Igor V. Fomenkov; Dmitri V. Gaidarenko; Jean-Marc Hueber; Richard G. Morton; Eckehard D. Onkels; Robert A. Shannon; Ross H. Winnick
Archive | 2000
I. Roger Oliver; William N. Partlo; Richard M. Ness; Richard L. Sandstrom; Stuart L. Anderson; Alex P. Ivaschenko; James K. Howey; Vladimir Kulgeyko; Jean-Marc Hueber; Daniel L. Birx
Archive | 1999
Herve A. Besaucele; Jean-Marc Hueber; Alexander I. Ershov; Thomas Hofmann; Vladimir B. Fleurov
Archive | 2000
Richard G. Morton; Jean-Marc Hueber
Archive | 2007
Zsolt Bor; Michael C. Cates; Vladimir B. Fleurov; Igor V. Fomenkov; Dmitri V. Gaidarenko; Jean-Marc Hueber; Eckehard D. Onkels; William N. Partlo; Richard C. Ujazdowski; ヴィ フォーメンコフ アイゴー; エヌ パートロ ウィリアム; ビー フルーロフ ウラディミール; ディ オンクルズ エクハード; マーク フーバー ジーン; ボル ズソルト; ヴィ ガイダレンコ ディミトリ; シー ケイツ マイケル; シー ユージャズドースキィ リチャード
Archive | 2007
Thomas Hofmann; Jean-Marc Hueber; Palach P. Das; Toshihiko Ishihara; Thomas P. Duffey; John T. Melchior; Herve A. Besaucele; Richard G. Morton; Richard M. Ness; Peter C. Newman; William N. Partlo; Daniel A. Rothweil; Richard L. Sandstrom
