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Michael C. Cates

Cymer, Inc.

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Publication

Featured researches published by Michael C. Cates.

Archive | 2001

Gas discharge laser with blade-dielectric electrode

Richard C. Ujazdowski; Michael C. Cates; Richard G. Morton; Jean-Marc Hueber; Ross H. Winnick

Archive | 2001

Electric discharge laser with acoustic chirp correction

William N. Partlo; Igor V. Fomenkov; Jean-Marc Hueber; Zsolt Bor; Eckehard D. Onkels; Michael C. Cates; Richard C. Ujazdowski; Vladimir B. Fleurov; Dmitri V. Gaidarenko

Archive | 2001

Gas discharge laser long life electrodes

Vladimir B. Fleurov; Michael C. Cates; Michael Du'lyea; Igor V. Fomenkov; Dmitri V. Gaidarenko; Jean-Marc Hueber; Richard G. Morton; Eckehard D. Onkels; Robert A. Shannon; Ross H. Winnick

Archive | 2000

FLOW SHAPING ELECTRODE WITH EROSION PAD FOR GAS DISCHARGE LASER

Richard C. Ujazdowski; Michael C. Cates; Richard G. Morton

Archive | 2007

ELECTRIC DISCHARGE LASER CAPABLE OF CORRECTING ACOUSTIC CHIRP

Zsolt Bor; Michael C. Cates; Vladimir B. Fleurov; Igor V. Fomenkov; Dmitri V. Gaidarenko; Jean-Marc Hueber; Eckehard D. Onkels; William N. Partlo; Richard C. Ujazdowski; ヴィ フォーメンコフ アイゴー; エヌ パートロ ウィリアム; ビー フルーロフ ウラディミール; ディ オンクルズ エクハード; マーク フーバー ジーン; ボル ズソルト; ヴィ ガイダレンコ ディミトリ; シー ケイツ マイケル; シー ユージャズドースキィ リチャード

Archive | 2001

Elektrischer entladungslaser mit akustischer chirp korrektur Electric discharge laser with audible chirp correction

Zsolt Bor; Michael C. Cates; Vladimir B. Fleurov; Igor V. Fomenkov; Dmitri V. Gaidarenko; Jean-Marc Hueber; Echeard D. San Diego Onkels; William N. Partlo; Richard C. Ujazdowski

Archive | 2001

Laser a decharge electrique a correction de fluctuation acoustique

William N. Partlo; Igor V. Fomenkov; Jean-Marc Hueber; Zsolt Bor; Echeard D. San Diego Onkels; Michael C. Cates; Richard C. Ujazdowski; Vladimir B. Fleurov; Dmitri V. Gaidarenko

Archive | 2001

Elektrischer entladungslaser mit akustischer chirp korrektur

Zsolt Bor; Michael C. Cates; Vladimir B. Fleurov; Igor V. Fomenkov; Dmitri V. Gaidarenko; Jean-Marc Hueber; Echeard D. San Diego Onkels; William N. Partlo; Richard C. Ujazdowski

Archive | 2001

Langlebige elektroden fur gasentladungslaser

Vladimir B. Fleurov; Michael C. Cates; Michael Du'lyea; Igor V. Fomenkov; Dmitri V. Gaidarenko; Jean-Marc Hueber; Richard G. Morton; Eckehard D. Onkels; Robert A. Shannon; Ross H. Winnick

Archive | 2001

Electric discharge laser with audible chirp correction

William N. Partlo; Igor V. Fomenkov; Jean-Marc Hueber; Zsolt Bor; Echeard D. San Diego Onkels; Michael C. Cates; Richard C. Ujazdowski; Vladimir B. Fleurov; Dmitri V. Gaidarenko

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Collaboration

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Jean-Marc Hueber

Cymer

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Dmitri V. Gaidarenko

Cymer

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Igor V. Fomenkov

Cymer

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Richard C. Ujazdowski

Cymer

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Vladimir B. Fleurov

Cymer

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William N. Partlo

Cymer

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Zsolt Bor

University of Szeged

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Richard G. Morton

Cymer

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Eckehard D. Onkels

Cymer

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Ross H. Winnick

Cymer

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