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Jeff Olsen

Applied Materials

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Publication

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Archive | 1997

Dual frequency excitation of plasma for film deposition

Kam S. Law; Robert Robertson; Quanyuan Shang; Jeff Olsen; Carl Sorensen

Archive | 2000

Multiple frequency plasma chamber with grounding capacitor at cathode

Sheng Sun; Jeff Olsen; Sanjay Yadav; Quanyuan Shang; Kam S. Law

Archive | 1995

Method of forming silicon oxy-nitride films by plasma-enhanced chemical vapor deposition

Kam S. Law; Jeff Olsen

Archive | 1999

Method of depositing amorphous silicon based films having controlled conductivity

William R. Harshbarger; Takako Takehara; Jeff Olsen; Regina Qiu; Yvonne Legrice; Guofu J. Feng; Robert Robertson; Kam S. Law

Multichamber and In-Situ Processing of Electronic Materials | 1990

Characterization Of A Multiple-Step In-Situ Plasma Enhanced Chemical Vapor Deposition (PECVD) Tetraethylorthosilicate (TEOS) Planarization Scheme For Submicron Manufacturing

Jeannine M. Perchard; Howard E. Smith; Robert O'Connor; Jeff Olsen; Kam S. Law

Archive | 2000

FORMATION OF AMORPHOUS SILICON SERIES FILM HAVING CONTROLLED ELECTRICAL CONDUCTIVITY

William R Hirschberger; Takehara Takako; Jeff Olsen; Regina Kiu; Yvonne Reguraisu; Guofu J Fen; Robert Robertson; Law Kam S

Archive | 1998

Excitation a double frequence d'un plasma pour deposition de film

Kam S. Law; Robert Robertson; Quanyuan Shang; Jeff Olsen; Carl Sorensen

Archive | 1994

Procédé de dépôt chimique en phase vapeur assisté par plasma de couche d'oxynitrure de silicium

Kam S. Law; Jeff Olsen

Archive | 1994

Verfahren zur plasma-unterstützten chemischen Dampfabscheidung von Silizium-Oxynitridschichten A method for plasma-assisted chemical vapor deposition of silicon oxynitride layers

Kam S. Law; Jeff Olsen

Archive | 1994

Formation of silicon oxynitride film by plasma-enhanced chemical vapor deposition

Kam S. Law; Jeff Olsen; ロウ カム; オルセン ジェフ

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Kam S. Law

Applied Materials

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Quanyuan Shang

Applied Materials

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Robert Robertson

Applied Materials

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Sanjay Yadav

Applied Materials

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Sheng Sun

Applied Materials

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Takako Takehara

Applied Materials

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William R. Harshbarger

Applied Materials

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