Jeffrey S. Kline

Etch induced microwave losses in titanium nitride superconducting resonators

We have investigated the correlation between the microwave loss and patterning method for coplanar waveguide titanium nitride resonators fabricated on silicon wafers. Three different methods were investigated: fluorine- and chlorine-based reactive ion etches and an argon-ion mill. At high microwave probe powers, the reactive etched resonators showed low internal loss, whereas the ion-milled samples showed dramatically higher loss. At single-photon powers, we found that the fluorine-etched resonators exhibited substantially lower loss than the chlorine-etched ones. We interpret the results by use of numerically calculated filling factors and find that the silicon surface exhibits a higher loss when chlorine-etched than when fluorine-etched. We also find from microscopy that re-deposition of silicon onto the photoresist and side walls is the probable cause for the high loss observed for the ion-milled resonators.

Two Level System Loss in Superconducting Microwave Resonators

High quality factor, i.e. low loss, microwave resonators are important for quantum information storage and addressing. In this work we study the resonance frequency and loss in superconducting coplanar waveguide resonators as a function of power and temperature. We find that there is increased loss at low power and low temperature. The increased loss is attributed to the existence of two-level systems (TLS) at the surfaces, interfaces, and in the bulk of insulators deposited on the structures. We show that both the temperature dependence of the resonant frequency and the power dependence of the loss can be used to find the TLS contribution to the loss. The TLS intrinsic loss tangent derived from the frequency shift data at high power is shown to agree well with the direct loss measurement at low power. The former allows for a relatively fast measurement of the TLS loss. As an example, we measure the properties of amorphous AlOX deposited on the resonators and find a TLS loss tangent of 1 × 10-3.

Josephson phase qubit circuit for the evaluation of advanced tunnel barrier materials

We have found that crystalline Josephson junctions have problems with the control of critical current density that decrease the circuit yield. We present a superconducting quantum bit circuit designed to accommodate a factor of five variation in critical current density from one fabrication run to the next. The new design enables the evaluation of advanced tunnel barrier materials for superconducting quantum bits. Using this circuit design, we compare the performance of Josephson phase qubits fabricated with MgO and Al2O3 advanced crystalline tunnel barriers to AlOx amorphous tunnel barrier qubits.

Effect of metal/substrate interfaces on radio-frequency loss in superconducting coplanar waveguides

Microscopic two-level systems (TLSs) are known to contribute to loss in resonant superconducting microwave circuits. This loss increases at low power and temperatures as the TLSs become unsaturated. We find that the loss is dependent on both the substrate-superconductor interface and the roughness of the surfaces. A native, oxide-free interface reduced the loss due to TLSs. However, a rough surface in the CPW gap did not cause more TLS loss, but the overall loss was significantly increased for the roughest surfaces.

Coherence in a transmon qubit with epitaxial tunnel junctions

We developed transmon qubits based on epitaxial tunnel junctions and interdigitated capacitors. This multileveled qubit, patterned by use of all-optical lithography, is a step towards scalable qubits with a high integration density. The relaxation time T1 is 0.72−0.86 μs and the ensemble dephasing time T2* is slightly larger than T1. The dephasing time T2 (1.36 μs) is nearly energy-relaxation-limited. Qubit spectroscopy yields weaker level splitting than observed in qubits with amorphous barriers in equivalent-size junctions. The qubit’s inferred microwave loss closely matches the weighted losses of the individual elements (junction, wiring dielectric, and interdigitated capacitor), determined by independent resonator measurements.We developed transmon qubits based on epitaxial tunnel junctions and interdigitated capacitors. This multileveled qubit, patterned by use of all-optical lithography, is a step towards scalable qubits with a high integration density. The relaxation time T1 is 0.72−0.86 μs and the ensemble dephasing time T2* is slightly larger than T1. The dephasing time T2 (1.36 μs) is nearly energy-relaxation-limited. Qubit spectroscopy yields weaker level splitting than observed in qubits with amorphous barriers in equivalent-size junctions. The qubit’s inferred microwave loss closely matches the weighted losses of the individual elements (junction, wiring dielectric, and interdigitated capacitor), determined by independent resonator measurements.

Reduced microwave loss in trenched superconducting coplanar waveguides

Reducing the contribution of all sources of microwave loss is important for increasing coherence times in superconducting qubits. In this paper we investigate reducing the loss by systematically removing Si substrate material from the gap region in titanium nitride coplanar waveguides fabricated on intrinsic Si substrates. By exploiting the radial dependence of the etch rate in a parallel plate reactive ion etcher, otherwise identical coplanar waveguides with only the Si gaps etched to varying depth, i.e., trenched, were created in a single TiN film within a single processing step. Measurements at these multiple depths permit the study of the loss reduction in isolation to the unintentional effects caused by any single processing step. When comparing the loss from all trench depths we found that the high power loss was similar, but in the single photon limit the loss was reduced by a factor of two for deeper trenches in agreement with predictions from finite element analysis.

Characterization and in-situ monitoring of sub-stoichiometric adjustable superconducting critical temperature titanium nitride growth

The structural and electrical properties of Ti-N films deposited by reactive sputtering depend on their growth parameters, in particular the Ar:N2 gas ratio. We show that the nitrogen percentage changes the crystallographic phase of the film progressively from pure α-Ti, through an α-Ti phase with interstitial nitrogen, to stoichiometric Ti2N, and through a substoichiometric TiNX to stoichiometric TiN. These changes also affect the superconducting transition temperature, TC, allowing, the superconducting properties to be tailored for specific applications. After decreasing from a TC of 0.4 K for pure Ti down to below 50 mK at the Ti2N point, the TC then increases rapidly up to nearly 5 K over a narrow range of nitrogen incorporation. This very sharp increase of TC makes it difficult to control the properties of the film from wafer-to-wafer as well as across a given wafer to within acceptable margins for device fabrication. Here we show that the nitrogen composition and hence the superconductive properties are related to, and can be determined by, spectroscopic ellipsometry. Therefore, this technique may be used for process control and wafer screening prior to investing time in processing devices. Contribution of U.S. government, not subject to copyright.

Identifying capacitive and inductive loss in lumped element superconducting hybrid titanium nitride/aluminum resonators

We present a method to systematically locate and extract capacitive and inductive losses in superconducting resonators at microwave frequencies by use of mixed-material, lumped element devices. In these devices, ultra-low loss titanium nitride was progressively replaced with aluminum in the inter-digitated capacitor and meandered inductor elements. By measuring the power dependent loss at 50 mK as the Al/TiN fraction in each element is increased, we find that at low electric field, i.e., in the single photon limit, the loss is two level system in nature and is correlated with the amount of Al capacitance rather than the Al inductance. In the high electric field limit, the remaining loss is linearly related to the product of the Al area times its inductance and is likely due to quasiparticles generated by stray IR radiation. At elevated temperature, additional loss is correlated with the amount of Al in the inductance, with a power independent TiN-Al interface loss term that exponentially decreases as the temperature is reduced. The TiN-Al interface loss is vanishingly small at the 50 mK base temperature.

Normal-state conductance used to probe superconducting tunnel junctions for quantum computing

Here we report normal-state conductance measurements of three different types of superconducting tunnel junctions that are being used or proposed for quantum computing applications: p-Al/a-AlO/p-Al, e-Re/e-AlO/p-Al, and e-V/e-MgO/p-V, where p stands for polycrystalline, e for epitaxial, and a for amorphous. All three junctions exhibited significant deviations from the parabolic behavior predicted by the WKB approximation models. In the p-Al/a-AlO/p-Al junction, we observed enhancement of tunneling conductances at voltages matching harmonics of Al–O stretching modes. On the other hand, such Al–O vibration modes were missing in the epitaxial e-Re/e-AlO/p-Al junction. This suggests that absence or existence of the Al–O stretching mode might be related to the crystallinity of the AlO tunnel barrier and the interface between the electrode and the barrier. In the e-V/e-MgO/p-V junction, which is one of the candidate systems for future superconducting qubits, we observed suppression of the density of states at zero bias. This implies that the interface is electronically disordered, presumably due to oxidation of the vanadium surface underneath the MgO barrier, even if the interface was structurally well ordered, suggesting that the e-V/e-MgO/p-V junction will not be suitable for qubit applications in its present form. This also demonstrates that the normal-state conductance measurement can be effectively used to screen out low quality samples in the search for better superconducting tunnel junctions.