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Dive into the research topics where Joachim Fritz is active.

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Featured researches published by Joachim Fritz.


international conference on optical mems and nanophotonics | 2009

Microscanner using self aligned vertical comb drives in a switched electrode configuration for large static rotation

Joachim Fritz; Stefan Pinter; Christoph Friese; Tjalf Pirk; H. Seidel

We present a microscanner actuated by self aligned vertical comb drives of high aspect ratio, designed for bidirectional static actuation. A stable rotational angle of ±8° is demonstrated at 290V<inf>DC</inf>.


international conference on thermal mechanical and multi physics simulation and experiments in microelectronics and microsystems | 2011

FEM based modeling and optimization of a 2D micro mirror

Wolfram Schock; Jan Mehner; Joachim Fritz; Jörg Dipl.-Ing. Muchow; Christoph Friese; Stefan Pinter

A 2D scanning micro mirror is modelled based on numerical simulations and optimized using the Matlab optimization Toolbox. The simulation model covers structural, fluidic and electrostatic effects. The goals of the optimization are low driving voltages and robustness against process variations. The simulated behaviour of the optimized design is compared to experimental results.


Archive | 2008

Deviation device for a beam of an electromagnetic wave

Tjalf Pirk; Stefan Pinter; Hubert Benzel; Heribert Weber; Michael Krueger; Robert Sattler; Njimonzie Frederic Njikam; Joerg Muchow; Joachim Fritz; Christoph Schelling; Christoph Friese


Archive | 2009

Method for manufacturing micromechanical device, involves arranging micro-electro-mechanical system structures and bond contact surfaces respectively in rows on micro-electro-mechanical system-wafer

Christoph Friese; Joachim Fritz; Stefan Pinter


Archive | 2009

CASCADED MICROMECHANICAL ACTUATOR STRUCTURE

Tjalf Pirk; Stefan Pinter; Joerg Muchow; Joachim Fritz; Christoph Friese


Archive | 2009

Magnetjoch, mikromechanisches bauteil und herstellungsverfahren für ein magnetjoch und ein mikromechanisches bauteil

Tjalf Pirk; Stefan Pinter; Joerg Muchow; Joachim Fritz; Christoph Friese


Archive | 2008

Micromechanical component having a slanted structure and corresponding production method

Tjalf Pirk; Stefan Pinter; Hubert Benzel; Heribert Weber; Michael Krueger; Robert Sattler; Njimonzie Frederic Njikam; Joerg Muchow; Joachim Fritz; Christoph Schelling; Christoph Friese


Archive | 2008

Mikromechanisches Bauelement und Herstellungsverfahren für ein mikromechanisches Bauelement

Christoph Friese; Joachim Fritz; Stefan Pinter; Tjalf Pirk


Archive | 2008

Micromechanical component comprising a rotatable adjusting element, method for the operation of said component, and method for the production of said component

Tjalf Pirk; Stefan Pinter; Joerg Muchow; Joachim Fritz; Christoph Friese


Archive | 2011

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME

Stefan Pinter; Joachim Fritz

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