Joachim Wietzorrek | Researchain

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Featured researches published by Joachim Wietzorrek.

Archive | 2004

Illumination system for microlithography

Wolfgang Singer; Joachim Wietzorrek; Joachim Hainz; Gabriele Weirauch; Manfred Maul

Archive | 2004

Collector with fastening devices for fastening mirror shells

Wolfgang Singer; Wilhelm Egle; Markus Weiss; Joachim Hainz; Joachim Wietzorrek; Johannes Wangler; Frank Melzer; Bernhard Gellrich; Bernhard Geuppert; Erich Schubert; Martin Antoni

Archive | 2004

Illumination system with field mirrors for producing uniform scanning energy

Wolfgang Singer; Joachim Hainz; Hans-Joachim Frasch; Johannes Wangler; Joachim Wietzorrek; Jörg Schultz

Archive | 2005

Optical system having an optical element that can be brought into at least two positions

Wolfgang Singer; Joachim Hainz; Joachim Wietzorrek; Markus Weiss

Archive | 2004

Lithography Lens System And Projection Exposure System Provided With At Least One Lithography Lens System Of This Type

Hans-Juergen Rostalski; Alexander Epple; Aurelian Dodoc; Johannes Wangler; Karl-Heinz Schuster; Joerg Schultz; Franz-Josef Stickel; Wolfgang Singer; Joachim Wietzorrek

Archive | 2007

EUV-lithography apparatus having a chamber for cleaning an optical element

Wolfgang Singer; Joachim Hainz; Joachim Wietzorrek; Markus Weiss

Archive | 2003

Optical subsystem, particularly for a projection exposure system comprising at least one optical element that can be brought into at least two positions

Joachim Hainz; Wolfgang Singer; Markus Weiss; Joachim Wietzorrek

Archive | 2004

Systeme d'eclairage pour microlithographie

Wolfgang Singer; Joachim Wietzorrek; Joachim Hainz; Gabriele Weirauch; Manfred Maul

Archive | 2004

Lithographie-objektiv und projektionsbelichtungsanlage mit mindestens einem solchen lithographie-objektiv

Hans-Jürgen Rostalski; Alexander Epple; Aurelian Dodoc; Johannes Wangler; Karl-Heinz Schuster; Jörg Schultz; Franz-Josef Stickel; Wolfgang Singer; Joachim Wietzorrek

Archive | 2004