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Joe Feng

Applied Materials

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Publication

Featured researches published by Joe Feng.

Archive | 2003

Silicon carbide deposition for use as a low-dielectric constant anti-reflective coating

Christopher Dennis Bencher; Joe Feng; Mei-Yee Shek; Chris Ngai; Judy H. Huang

Archive | 1996

Method and apparatus for depositing antireflective coating

David Cheung; Joe Feng; Judy H. Huang; Wai-Fan Yau

Archive | 2002

Method for forming silicon containing layers on a substrate

Nagarajan Rajagopalan; Joe Feng; Christopher S. Ngai; Mei-Yee Shek; Suketu A. Parikh; Linh Thanh

Archive | 1997

Method for applying films using reduced deposition rates

David Cheung; Joe Feng; Madhu Deshpande; Wai-Fan Yau; Judy H. Huang

Archive | 2000

Method and apparatus for applying films using reduced deposition rates

David Cheung; Joe Feng; Madhu Deshpande; Wai-Fan Yau; Judy H. Huang

Archive | 1996

Method and apparatus for improving accuracy in photolithographic processing of substrates

David Cheung; Joe Feng; Judy H. Huang; Wai-Fan Yau

Archive | 1997

Method and apparatus for depositing a film over a substrate

David Cheung; Joe Feng; Judy H. Huang; Wai-Fan Yau

Archive | 1999

Silicon carbide for use as a low dielectric constant anti-reflective coating and its deposition method

Christopher Dennis Bencher; Joe Feng; Mei-Yee Shek; Chris Ngai; Judy H. Huang

Archive | 2001

Method of nitrogen doping of fluorinated silicate glass (FSG) while removing the photoresist layer

Christopher S. Ngai; Christopher Dennis Bencher; Joe Feng; Peter Chen

Archive | 1998

Method and system for depositing films

David Cheung; Madhu Deshpande; Joe Feng; Judy H. Huang; Wai-Fan Yau

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Collaboration

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Judy H. Huang

Applied Materials

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David Cheung

Applied Materials

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Wai-Fan Yau

Applied Materials

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Madhu Deshpande

Applied Materials

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Christopher Dennis Bencher

Rice University

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Mei-Yee Shek

Applied Materials

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Chris Ngai

Applied Materials

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Christopher S. Ngai

Applied Materials

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Anjana M. Patel

Applied Materials

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Linh Thanh

Applied Materials

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